PFEIFFER ASM 390 / 392 (Helium Leak Detectors/ Máy dò tìm rò rỉ (Máy phát hiện rò rỉ) Hê-li)
Giá bán: Liên Hệ.
- Mô tả sản phẩm
PFEIFFER ASM 390 / 392 Series
“Rapid pump-down and short response times for large test objects“
- Smart and user-friendly
- Superior performance and rapid testing
- Ergonomic and highly maneuverable
Benefits of the ASM 390/392 series
The ASM 390 and ASM 392 are the perfect leak detection solutions for the semiconductor and flat panel industries as well as other demanding applications where short pump-down times and high sensitivity is key. Both units are fully Semi S2 compliant.
These leak detectors are fitted with a powerful high vacuum pump and a dry backing pump, making them the ideal tools for leak testing in clean environments where oil-free operation is essential. The ASM 392 is equipped with an additional turbomolecular vacuum pump, speeding up your leak detection process and reducing production downtime.
The ASM 390 and ASM 392 share the same platform and are uniquely ergonomic with a size that creates a comfortable working height, a secondary handle in the front, a fully rotatable, removable color display, and an inlet in the front for easy connection to test ports. This allows easy access to all testing areas, even in tight spaces.
An integrated toolbox and storage space for vacuum bellows ensure that the equipment you need for quick and trouble-free leak detection is always to hand. The intuitive user menu can be password protected to prevent unintended use. Furthermore, ASM units are available with an interface board for automation through an external system (PC or PLC)
ASM 390
The ASM 390 series is optimized for fast and accurate leak testing in all measurement ranges. It is the perfect combination of high pumping speed, sensitivity and mobility with the smallest possible footprint.
- 10 l/s helium pumping speed for a fast response time
- 35 m3/h pumping speed of the backing pump using an oil-free ACP
- Maximum test pressure at 20 hPa (mbar) for a rapid entry into measurement mode and additional massive mode for large leaks
ASM 392
The ASM 392 series provides unrivalled performance with high sensitivity and accuracy. Sharing the same platform as the ASM 390 and equipped with an additional turbomolecular vacuum pump, the ASM 392 will speed up your leak detection process without any compromise on footprint and mobility.
- 25 l/s helium pumping speed for a faster response time
- 35 m3/h pumping speed of the backing pump using an oil-free ACP
- Maximum test pressure at 20 hPa (mbar) for a rapid entry into measurement mode and additional massive mode for large leaks
Technical specifications
| Technical data | ASM 390 | ASM 392 |
|---|---|---|
| Test method | Spraying and sniffing tests | Spraying and sniffing tests |
| Detectable gases | ⁴He; ³He; H₂ | ⁴He; ³He; H₂ |
| Min. detectable leak rate for Helium (spraying test) (Pa m³/s) | 1 · 10⁻¹³ Pa m³/s | 1 · 10⁻¹³ Pa m³/s |
| Min. detectable leak rate for Helium (spraying test) (mbar l/s) | 1 · 10⁻¹² mbar l/s | 1 · 10⁻¹² mbar l/s |
| Min. detectable leak rate for Helium (sniffing test) (Pa m³/s) | 1 · 10⁻⁹ Pa m³/s | 1 · 10⁻⁹ Pa m³/s |
| Min. detectable leak rate for Helium (sniffing test) (mbar l/s) | 1 · 10⁻⁸ mbar l/s | 1 · 10⁻⁸ mbar l/s |
| Pumping speed for Helium | 10 l/s | 25 l/s |
| Power supply | 100-240 V | 100-240 V |
| Power consumption | 800 W | 800 W |
| Max. power consumption | 1600 W | 1600 W |
| Max. test inlet pressure | 20 mbar | 20 mbar |
| Start-up time (20 °C) | <2 min | <2 min |
| Response time | <1 s | <1 s |
| Backing pump | Multi-stage Roots vacuum pump | Multi-stage Roots vacuum pump |
| Roughing capacity | 35 m³/h | 35 m³/h |
| Operating temperature | 10-35 °C | 10-35 °C |
| Communication interfaces | I/O, RS-232, Ethernet (PC, not industrial) | I/O, RS-232, Ethernet (PC, not industrial) |
| Sound pressure level | ≤ 55 dB(A) | ≤ 55 dB(A) |
| Weight approx. | 125 kg | 130 kg |
| Dimensions (L x W x H) | 1072 x 455 x 1025 mm | 1072 x 455 x 1025 mm |
| Inlet port | DN 40 ISO-KF | DN 40 ISO-KF |
Markets & applications
- Leak Detection and EoL Testing
- Leak Detection and EoL Testing (Master)
- Leak Detection
- Load Lock Chambers
- Plasma-enhanced chemical vapor deposition (PECVD)
- Physical vapor deposition (PVD)
- Leak Detection and EoL Testing (Master)
- Leak Testing Of Medical Devices
- Leak Detection
- High Energy Physics
- Leak Detection
- Leak Detection and EoL Testing
- LPCVD / Diffusion
- High flow applications
- Stripping / Ashing
- PVD
- Inspection & Metrology
- Si Poly etch
- Light deposition
- Ion Implantation
- PECVD
- Lithography
- Metal & high K etch
- Oxyde Etch
- Load Lock & Transfer
- Cobalt, WCVD, TiN & TDMAT
- ALD
- Annealing
- Liquefaction
- Insulation Vacuum
- Gas Transport
- Bottle Filling
- Lab coating
