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1110_HPG400

INFICON HPG400 Hot Ionization Gauges (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)

Giá bán: Liên Hệ.

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INFICON HPG400 Hot Ionization Gauges

“ATM to High Vacuum Gauge”

The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10-6 mbar to atmosphere (1.5×10-6 Torr to atmosphere).

The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.

Advantages

  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance

Typical applications

  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range

Specifications

Measurement range (air, N2)mbar
Torr
2×10-6 … 1000
1.5×10-6 … 750
Accuracy
10-5 … 1 mbar% of reading±15 (1)
Repeatability
10-5 … 10-1 mbar% of reading2
10-1 … 100 mbar% of reading30
Temperature
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange°C80
Bakeout electronics removed°C150
Supply voltageV (dc)
A (dc)
20 … 28
0.8
Materials exposed to vacuumYt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
(1) Accuracy from 10-5 mbar to the selected hot ion emission on value

Download full specifications

Part Number

Part Number

Part NumberDescription
353-520HPG400 DN 25 ISO-KF
353-521HPG400 LCD, DN 25 ISO-KF
353-522HPG400 DN 40 CF-F
353-523HPG400 LCD, DN 40 CF-F
353-525HPG400-SP PBus, DN 25 ISO-KF
353-526HPG400-SP PBus, DN 40 CF-F
353-527HPG400-SD DNet DN 25 ISO-KF
353-528HPG400-SD DNet DN 40 CF-F

Accessories

Part NumberDescription
211-113Centering ring with baffle DN 25 KF
353-511Power supply BPG400 24VDC
357-499Baffle HPG (10 pieces)

Spare Parts

Part NumberDescription
354-487Spare sensor head HPG400, DN 25 ISO-KF
354-488Spare sensor head HPG400, DN 40 CF-F