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LEAK DETECTORS

UHP GAS EQUIPMENT

VACUUM EQUIPMENT

THIN FILM EQUIPMENT

SẢN PHẨM KHÁC

1143_BCG450

INFICON BCG450 Hot Ionization Gauges (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)

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INFICON BCG450 Hot Ionization Gauges

“ATM to Ultra High Vacuum TripleGauge®”

The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (TripleGauge®), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr).

The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.

Also available wth PROFINET digital interface.

Advantages

  • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
  • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
  • Pirani interlock protects the hot filament from premature burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
  • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
  • Optional graphic display and Fieldbus interfaces available
  • RoHS compliance

Typical applications

  • Pressure measurement in Semiconductor process, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

Specifications

Measurement range (air, O2, CO, N2)mbar
Torr		5×10-10 … 1500
3.75×10-10 … 1125
Accuracy
10-8 … 50 mbar% of reading±15
50 … 950 mbar% of reading±5
950 … 1050 mbar% of reading±2.5
Repeatability
10-8 … 10-2 mbar% of reading5
Temperature
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange°C80
Bakeout electronics removed°C150
Supply voltageV (dc)
A (dc)		20 … 28
0.8
Materials exposed to vacuumYt2O3, Ir, Mo, Cu, W, NiFe, NiCr, AI2O3, SnAg, stainless steel, glass

Download full specifications

Part Number

Part Number

Part NumberDescription
353-550BCG450 DN 25 ISO-KF
353-551BCG450 DN 40 CF-R
353-552BCG450 LCD, DN 25 ISO-KF
353-553BCG450 LCD, DN 40 CF-R
353-554BCG450-SP PBus, DN 25 ISO-KF
353-556BCG450-SP PBus, DN 40 CF-R
353-557BCG450-SD DNet, DN 25 ISO-KF
353-558BCG450-SD DNet, DN 40 CF-R
353-592BCG450-SE ECAT, DN 25 ISO-KF
353-593BCG450-SE ECAT, DN 40 CF-R
353-598BCG450-SE ECAT, DN 25 ISO-KF
353-599BCG450-SE ECAT, DN 40 CF-R
353-517BCG450-PN PROFINET, DN 25 ISO-KF
353-518BCG450-PN PROFINET, DN 40 CF-R

Accessories

Part NumberDescription
353-511Power supply BPG400 24VDC
353-512Baffle for BPG400
211-113Centering ring with baffle DN 25 KF

Spare Parts

Part NumberDescription
354-492Spare sensor head BCG450, DN 25 ISO-KF
354-493Spare sensor head BCG450, DN 40 CF-R

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