
INFICON VGC094 (Vacuum Gauge Controller/ Bộ điều khiển đồng hồ đo chân không)
Giá bán: Liên Hệ.
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INFICON VGC094
“The modular all-in solution for vacuum control”
VGC094 is a prestigious solution for vacuum process measurement, control and data log. Compatible to the wide range of INFICON passive gauges, VGC094 is able to monitor the entire vacuum pressure range from 1×10-11 to 1000 mbar. VGC094 can be user-configured to control up to 4 passive gauge heads (Pirani gauges, inverted magnetron gauges) by two sets of measurement boards. The controller provides the latest digital communication interfaces (USB, RS485, Ethernet) and can be customized with users’ specific communication standards thanks to individual interface boards (PROFIBUS, PROFINET). VGC094 is the ideal solution for applications with demanding performance, such as operation from long distance, high temperature or high ionizing radiation exposure.
Advantages
- Complete solution for vacuum monitoring and control monitor from 1×10-11 to 1000 mbar, even at long distance
- Bright and clear screen
- Bar graph display with set-point or pressure vs. time views
- Simple sensor operation with intuitive and guided menus for parameter, sensor or general settings
- Data and parameter log function with USB port (rear side) and USB flash drive (front side)
- High resolution – 16 bit A/D converter
- 4 programmable 0 to 10 V chart recorder output
- Four free definable setpoints per channel with adjustable hysteresis
- RS485, Ethernet, optional RS232 and fieldbus communication interfaces
Specifications
VGC094
| Measurement channel | 4 |
| Display | LCD, LED backlight |
| Measurement rate | 100 s-1 |
| Display rate | 10 s-1 |
| Measurement range | 1 x 10-11 … 1000 mbar |
| Measurement unit (selectable) | mbar, Torr, hPa, Micron, V |
| Slots for plug-in boards | 2 measurement boards 1 interface board |
| Setpoint relays | 4 |
| Error relay | 1 |
| Channel assignement | freely assignable |
| Adjustment range | sensor dependent |
| Hysteresis | adjustable |
| Rely contact | floating changeover contact |
| Contact rating | 30 V (ac) / 1.5 A |
| 30 V (dc) / 1.5 A | |
| Connector | D-sub, 25-pin, female |
| Analog output | 4 |
| Range | 0 … 10 V / 4 … 20 mA |
| Interface (digital) | USB slave, master, RS485, Ethernet, USB Type A (flash drive), USB Type B, M12 5-pin FCC68/RJ45 |
| Power supply | 100 … 240 V (ac) |
| Frequency | 50 … 60 Hz |
| Operation temperature | +5 … +50°C |
Part Number
Part number
| 398-401 | VGC094 Vacuum Gauge Controller |
| Cable for PSG010 80°C Cable connectors: Amphenol / Amphenol | |
| BG548402-T | 3 m (9.9 ft) |
| BG548403-T | 6 m (19.8 ft) |
| BG548450-T | 10 m (33 ft) |
| BG548451-T | 15 m (49 ft) |
| Cable for PSG017/018 80°C Cable connectors: Amphenol / Push-pull self-latching | |
| BG548308-T | 3 m (9.9 ft) |
| BG548309-T | 6 m (19.8 ft) |
| BG548456-T | 10 m (33 ft) |
| BG548457-T | 15 m (49 ft) |
| Cable for PSG017/018 250°C Cable connectors: Amphenol / Push-pull self-latching | |
| BG548414-T | 3 m (9.9 ft) |
| BG548465-T | 6 m (19.8 ft) |
| BG448047-T | 10 m (33 ft) |
| BG448043-T | 15 m (49 ft) |
| Extensions cables for PSG010/017/018 80°C Cable connectors: Amphenol / Amphenol | |
| BG548466-T | 10 m (33 ft) |
| BG548468-T | 20 m (65 ft) |
| BG548470-T | 30 m (99 ft) |
| Cable for MAG050/060/084 80°C Cable connectors: Bayonet, SHV / SHV | |
| BG548406-T | 3 m (9.9 ft) |
| BG548407-T | 6 m (19.8 ft) |
| BG548419-T | 10 m (33 ft) |
| BG548483-T | 15 m (49 ft) |
| Cable for MAG050/060/084 250°C Cable connectors: Bayonet, SHV / SHV | |
| BG548542-T | 3 m (9.9 ft) |
| BG548543-T | 6 m (19.8 ft) |
| BG448045-T | 10 m (33 ft) |
| BG548989-T | 15 m (49 ft) |
| Cable for MAG070 80°C Cable connectors: Push-pull self-latching, Triax / Triax | |
| BG548306-T | 3 m (9.9 ft) |
| BG548317-T | 6 m (19.8 ft) |
| BG548490-T | 10 m (33 ft) |
| BG548491-T | 15 m (49 ft) |
| Measurement boards | |
| IG546920-T | Double Pirani measurement board, PI 300 D |
| IG549212-T | Double Pirani measurement board, PI 300 DL |
| IG549214-T | Double Pirani measurement board, PI 300 DN |
| IG441375-T | Double cold cathode measurement board, PE 300 DC9 |
| IG441000-T | Pirani/Cold cathode measurement board, CP 300 C9 |
| IG441114-T | Pirani/Cold cathode measurement board, CP 300 C10 |
| IG441080-T | Pirani/Cold cathode measurement board, CP 300 T11 |
| IG441120-T | Pirani/Cold cathode measurement board, CP 300 T11L |
| Interface boards | |
| IG441130-T | Interface and relay board, IF300A RS232C |
| IG441250-T | Interface and relay board, IF300B RS232 |
| IG441390-T | Interface and relay board, IF300C RS422 |
| IG441395-T | Interface and relay board, IF300P PROFIBUS |
| IG441396-T | Interface and relay board, IF301P PROFIBUS semi relay |
| 398-421 | Interface board, IF500 PROFINET |
| Pirani Gauges | |
| 350-400 | PSG010 DN 10 ISO-KF |
| 350-430 | PSG017 DN 16 ISO-KF |
| 350-431 | PSG017 DN 16 CF-F |
| 350-420 | PSG018 DN 16 ISO-KF |
| 350-424 | PSG018 DN 16 CF-F |
| 350-423 | PSG018 DN 40 CF-F |
| Cold Cathode Gauges | |
| 399-840 | MAG050 DN 25 ISO-KF |
| 399-841 | MAG050 DN 40 ISO-KF |
| 399-842 | MAG050 DN 40 CF-F |
| 399-845 | MAG060 DN 40 ISO-KF |
| 399-846 | MAG060 DN 40 CF-F |
| 399-847 | MAG070 DN 40 ISO-KF |
| 399-848 | MAG070 DN 40 CF-F |
| 399-849 | MAG084 DN 40 ISO-KF |
| 399-850 | MAG084 DN 40 CF-F |
Pirani gauges
PSG010
| Pressure range | 8×10-4 … 1000 mbar |
| Feedthrough | Internal seal | Glass | Elastomer (FPM) |
| Bake-out temperature range | ≤100°C |
| Ionizing radiation tolerance | – |
| Features | Tungsten (W) filament |
PSG017
| Pressure range | 8×10-4 … 1000 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤250°C |
| Ionizing radiation tolerance | 106 Gy |
| Features | Nickel (Ni) filament, corrosion resistant |
PSG018
| Pressure range | 8×10-4 … 1000 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤250°C |
| Ionizing radiation tolerance | 106 Gy |
| Features | Tungsten (W) filament |
Inverted magnetron cold cathode gauges
MAG050
| Pressure range | 2×10-9 mbar to 5×10-3 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Elastomer (FPM) |
| Bake-out temperature range | ≤150°C |
| Ionizing radiation tolerance | – |
| Magnetic field immunity | – |
| Features | Coax connector |
MAG060
| Pressure range | 1×10-10 mbar to 5×10-3 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤250°C |
| Ionizing radiation tolerance | 107 Gy |
| Magnetic field immunity | – |
| Features | Coax connector |
MAG070
| Pressure range | 1×10-11 mbar to 5×10-3 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤250°C |
| Ionizing radiation tolerance | 107 Gy |
| Magnetic field immunity | – |
| Features | Triax connector |
MAG084
| Pressure range | 1×10-8 mbar to 5×10-3 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature range | ≤230°C |
| Ionizing radiation tolerance | 107 Gy |
| Magnetic field immunity | |
| Axial | ≤280 mT |
| Radial | ≤180 mT |
| Features | Double ionization chamber principle Coax connector |
Measurement configurations
Slot A + B
| Board type | Double Pirani measurement boards (PI 300 D, DN or DL) Double Cold Cathode measurement boards (PE 300 DC9) Pirani + Cold Cathode combination measurement boards (CP 300 C9, C10, T11, T11L) |
Slot C
| Board type | Interface board IF 300 A, B, C, P, IF301 P, IF 500 PN |
Measurement boards – Pirani
PI 300 D
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG010 / PSG018 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | – |
PI 300 DN
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG017 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | – |
PI 300 DL
| Measurement channels | Doube Pirani (2 sensors) |
| Gauge type | PSG010 / PSG018 |
| Max operating distance | |
| Pirani | ≤500 m |
| Cold cathode | – |
Measurement boards – Cold Cathode
PE 300 DC9
| Measurement channels | Double Cold Cathode (2 sensors) |
| Gauge type | MAG050 / MAG060 |
| Max operating distance | – |
| Pirani | – |
| Cold cathode | ≤100 m1) |
| 1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range | |
Measurement boards – Pirani / Cold Cathode combination
CP 300 C9
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG050 or MAG60 or MAG084 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤100 m 1) |
| 1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range | |
CP 300 C10
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG050 or MAG60 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤100 m 1) |
| 1) ≤40 m (MAG050) / 6 m (MAG060) when using the lower measurement range | |
CP 300 T11
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG070 |
| Max operating distance | |
| Pirani | ≤100 m |
| Cold cathode | ≤500 m |
CP 300 T11L
| Measurement channels | Pirani + Cold Cathode combination |
| Gauge type | PSG010 or PSG018 MAG070 |
| Max operating distance | |
| Pirani | ≤500 m |
| Cold cathode | ≤500 m |
Interface boards
IF 300 A
| Communication protocol | RS232C interface and relays (1.5 A) |
IF 300 B
| Communication protocol | RS232 interface and relays (4.0 A) |
IF 300 C
| Communication protocol | RS422 interface and relays (1.5 A) |
IF 300 P
| Communication protocol | PROFIBUS interface and relays (1.5 A) |
IF 301 P
| Communication protocol | PROFIBUS interface and solid state relays (0.5 A) |
IF 500 PN
| Communication protocol | PROFINET interface |














