INFICON Transpector® XPR 3+

“Extended Pressure Range RGA – Innovation by Sensorization”

Monitor and Control Rapid Process Changes

The new Transpector XPR 3+ Residual Gas Analyzer (RGA) provides industry-leading measurement speeds to monitor and control the rapid process changes required for modern semiconductor and display manufacturing. Transpector XPR 3+ is ideal for in-situ air leak, gas purity, hydrocarbon, and contamination monitoring. Real time measurement with the Transpector XPR 3+ provides far superior product protection compared to periodic rate of rise tests.

Driving Profitability by Maximizing Tool Uptime

The Transpector XPR 3+ RGA is a field proven quadrupole and dual ion source sensor for sputtering pressure range applications. No pressure conversion equipment is required, long lifetime components, and the ability to rapidly detect and diagnose problems combine to maximize tool availability, product throughput and yield. The sensor can be operated continuously from high vacuum to 20 mTorr, without the need for pumps. The Transpector XPR 3+ dual ion source’s chambers are designed to limit coating to maintain ion source sensitivity and extend the sensor’s mean time to maintenance.

Advantages