INFICON SKY® CDG025D-X3 Capacitance Diaphragm Gauge (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)
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INFICON SKY® CDG025D-X3 Capacitance Diaphragm Gauge
“Precision and Reliability Redefined”
In applications where precision and reliability are critical, INFICON SKY introduces the CDG025D-X3 Capacitance Diaphragm Gauge, a top-of-the-line product for pressure measurement and control. This gauge combines decades of experience with state-of-the-art technology to set an unsurpassed standard in the industry.
Introduction to SKY® CDG025D-X3
Highly accurate temperature compensation: The CDG025D-X3 uses advanced temperature-compensated technology. This ensures that the instrument provides reliable and accurate measurements even under extreme conditions.
The corrosion resistant ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts.
Advanced digital electronics: The electronics in this gauge are not only state-of-the-art, but also offer an impressive list of features. One-touch zeroing and setpoint adjustment increase ease of use.
The Latest SKY® Technology
Long-life ceramic sensor: The corrosion-resistant ultra-ceramic sensor gives the gauge excellent long-term signal stability and a life expectancy of millions of pressure cycles, even during atmospheric pressure drops.
In addition, a patented sensor shield protects the gauge from process contamination. This is particularly important in typical applications such as semiconductor production equipment, especially in processes such as Etch, CVD, PVD and ALD. The CDG025D-X3 is also ideal for data storage and display manufacturing equipment, industrial vacuum process equipment, and general pressure measurement where high accuracy is required.
Special Qualities and Advantages
In today’s industrial environment, where electromagnetic interference can be a serious problem, the CDG025D-X3 has been designed with EMC compatibility in mind. This, combined with its impressive long-term stability and temperature compensation, ensures years of reliable performance.
In addition, the CDG025D-X3 provides fast stability after power-up and equally fast recovery after atmospheric pressure exposure, making it an indispensable instrument for demanding industrial applications. It is not just a gauge, but a symbol of quality and innovation in vacuum measurement technology.
Benefits
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor double protected from contamination
- One pushbutton zero function
- Wide range power supply
- 2 setpoints
- RS232 interface
- Clean room compliant
Typical applications
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Specifications
| Accuracy | % of reading | 0.2 |
| Resolution | percent FS | 0.003 |
| Output signal (analog) | V (dc) | 0 … +10 |
| Response time | ms | 30 |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) |
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