Features
Inheritance and Evolution of Process Durability
Major Products
| Model*1 | SDX600 | SDT600 | SDX1200 | SDT1200 | SDX1800 | SDT1800 | SDH3000*5 | SDH6000*5 | |
| Max. pumping speed [L/min]*2 *6 | 10,000 | 18,000 | 19,000 | 30,000 | 50,000 | 100,000 | |||
| Ultimate pressure [Pa] *2 | 0.5 | 0.3 | 0.5 | ||||||
| Supply voltage(50/60Hz) | 3Phase, AC200～220V*7 | ||||||||
| N2 purge[SLM] | 0～80 | 0～120 | |||||||
| Cooling water[L/min] | 3.0 | 4.0 | 3.0 | 4.0 | 3.0 | 4.0 | 4.0 | 4.0 | |
| Power consumption[kW]*3 | 1.5 | 3.0 | 1.65 | 3.15 | 2.1 | 3.3 | 3.3 | 3.7 | |
| Dimensions [mm]*4 | L | 695 | 695 | 850 | 910 | 1050 | |||
| W | 285 | 285 | 380 | 420 | 515 | ||||
| H | 850 | 850 | 950 | 900 | 950 | ||||
*1) SDX: Energy-saving, harsh process-compatible; SDT/SDH: Super harsh and process durable
*2) Data without heater nor N2 purge *3) Approximate data while ultimate pressure *4) Package dimension
*5) Please contact our sales representative for more information regarding the product lineup for even greater process robustness. (For information regarding compatible gases, please inquire with us.)
*6) The maximum pumping speed is an approximate value. *7) Contact us for other volotage options.
S-P Curve
