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INFICON BPG402-Sx Hot Ionization Gauges (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)

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INFICON BPG402-Sx Hot Ionization Gauges

“ATM to Ultra High Vacuum Gauge”

The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere).

Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors.

Also available with the EtherCAT digital interface!

Advantages

  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • Pirani interlock protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O2, CO, N2)mbar
Torr
5×10-10 … 1000
3.8×10-10 … 750
Accuracy
10-8 … 10-2 mbar% of reading±15
Repeatability
10-8 … 10-2 mbar% of reading5
Temperature
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange without electronics BPG402-S°C80
Bakeout at flange without electronics BPG402-SL°C150
Supply voltageV (dc)
A (dc)
+20 … +28
≤0.8
Materials exposed to vacuumYt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

Download full specifications

Part Number

Part Number

Part NumberDescription
353-570BPG402-S DN 25 ISO-KF
353-571BPG402-S DN 40 CF-R
353-572BPG402-S LCD, DN 25 ISO-KF
353-573BPG402-S LCD, DN 40 CF-R
353-578BPG402-SL long tube DN 40 CF-R
353-574BPG402-SP PBus, DN 25 ISO-KF
353-575BPG402-SP PBus, DN 40 CF-R
353-576BPG402-SD DNet, DN 25 ISO-KF
353-577BPG402-SD DNet, DN 40 CF-R
353-590BPG402-SE ECAT, DN 25 ISO-KF
353-591BPG402-SE ECAT, DN 40 CF-R
353-596BPG402-SE ECAT, DN 25 ISO-KF
353-597BPG402-SE ECAT, DN 40 CF-R

Accessories

Part NumberDescription
353-511Power supply BPG400 24VDC
353-512Baffle for BPG400
211-113Centering ring with baffle DN 25 KF

Spare Parts

Part NumberDescription
354-494Spare sensor head BPG402 DN 25 ISO-KF
354-495Spare sensor head BPG402 DN 40 CF-R