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INFICON BPG400 Hot Ionization Gauges (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)

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INFICON BPG400 Hot Ionization Gauges

“ATM to Ultra High Vacuum Gauge”

The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere).

Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.

Advantages

  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridium filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance
  • General vacuum measurement and control in the low to ultra high vacuum range

Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O2, CO, N2)mbar
Torr
5×10-10 … 1000
3.8×10-10 … 750
Accuracy
10-8 … 10-2 mbar% of reading±15
Repeatability
10-8 … 10-2 mbar% of reading5
Temperature
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange with extension°C150
Bakeout at flange without extension°C80
Bakeout electronics removed°C150
Supply voltageV (dc)
A (dc)
+20 … +28
0.8
Materials exposed to vacuumYt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

Download full specifications

Part Number

Part Number

Part NumberDescription
353-500BPG400 DN 25 ISO-KF
353-501BPG400 LCD, DN 25 ISO-KF
353-502BPG400 DN 40 CF-R
353-503BPG400 LCD, DN 40 CF-R
353-505BPG400-SP PBus, DN 25 ISO-KF
353-506BPG400-SP PBus, DN 40 CF-R
353-507BPG400-SD DNet, DN 25 ISO-KF
353-508BPG400-SD DNet, DN 40 CF-R

Accessories

Part NumberDescription
353-511Power supply BPG400 24VDC
353-510100 mm sensor extension tube
353-512Baffle for BPG400
211-113Centering ring with baffle DN 25 KF

Spare Parts

Part NumberDescription
354-490Spare sensor head BPG400, DN 25 ISO-KF
354-491Spare sensor head BPG400, DN 40 CF-R