INFICON PSG010, PSG017 & PSG018 Pirani Gauges (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)
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INFICON PSG010, PSG017 & PSG018 Pirani Gauges
“Pirani passive gauge heads for VGC094”
The gauge heads PSG010, PSG017 and PSG018 are long-established passive Pirani gauges intended to operate with the Vacuum Gauge Controller VGC094. They are designed for vacuum measurement of gases in the pressure range of 8×10-4 to 1000 mbar. The compact metal design provides a robust solution suitable for general vacuum applications.
While PSG010 is suited for general vacuum applications, PSG017 and PSG018 respond to needs of demanding applications requiring bake-out temperature up to 250 °C or high ionizing radiation resistance, thanks to a metal sealing design. PSG017 has a Nickel filament suitable for corrosive media applications.
Advantages
- Elastomer (PSG010) or metal-sealed (PSG017, PSG018) design
- Specified high measurement accuracy and repeatability
- Bake-out temperature up to 100 °C (PSG010) / 250 °C (PSG017, PSG018)
- Ionizing radiation resistant up to 106 Gy (PSG017, PSG018)
- Corrosion resistance with Ni filament (PSG017)
- Cable length up to 100 m (500 m with PI 300 DL/CP 300 T11L)
Typical applications
- General vacuum measurement and control for demanding and/or high temperature applications from low to the high vacuum range
Operating Units
- Vacuum Gauge Controller VGC094
Specifications
PSG010
| Measurement principle | Pirani |
| Measurement range (air, O2, CO, N2) | 8×10-4 … 1000 mbar |
| Accuracy (N2) | |
| in the range of ≥100 mbar | up to factor 2 of reading |
| at room temperature and cable length <20 m | ~±20% of reading in the range of 1×10-1 … 10 mbar up to factor 2 of reading in the range of ≤10-2 mbar |
| Repeatability (N2) | ~±2% of reading in the range of 1×10-2 … 100 mbar |
| Feedthrough | Internal seal | Glass | Elastomer (FPM) |
| Bake-out temperature | ≤100 °C |
| Max operating distance | ≤100 m |
| Materials exposed to vacuum | AIMgSi, glass, FPM, W, Ni, sinter bronze |
| Features | Tungsten (W) filament |
PSG017
| Measurement principle | Pirani |
| Measurement range (air, O2, CO, N2) | 8×10-4 … 1000 mbar |
| Accuracy (N2) | |
| in the range of ≥100 mbar | up to factor 2 of reading |
| at room temperature and cable length <20 m | ~±10% of reading in the range of 1×10-2 … 100 mbar |
| Repeatability (N2) | ~±2% of reading in the range of 1×10-2 … 100 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature | ≤250 °C |
| Max operating distance | ≤100 m |
| Ionizing radiation tolerance | 106 Gy |
| Materials exposed to vacuum | Stainless steel, AI2O3, Ag, Ni |
| Features | Nickel (Ni) filament, corrosion resistant |
PSG018
| Measurement principle | Pirani |
| Measurement range (air, O2, CO, N2) | 8×10-4 … 1000 mbar |
| Accuracy (N2) | |
| in the range of ≥100 mbar | up to factor 2 of reading |
| at room temperature and cable length <20 m | ~±10% of reading in the range of 1×10-2 … 100 mbar |
| up to +70 °C and within the entire range of specified cable length | ~±20% of reading in the range of 1×10-2 … 100 mbar |
| within the entire specified range of temperatures and cable length | ~±35% of reading in the range of 1×10-2 … 100 mbar |
| Repeatability (N2) | ~±2% of reading in the range of 1×10-2 … 100 mbar |
| Feedthrough | Internal seal | AI2O3 ceramic | Metal |
| Bake-out temperature | ≤250 °C |
| Max operating distance | ≤500 m (with PI 300 DL/CP 300 T11L) |
| Ionizing radiation tolerance | 106 Gy |
| Materials exposed to vacuum | Stainless steel, AI2O3, Ag, W, Ni |
| Features | Tungsten (W) filament |
Part Number
Part number
| PSG010 | |
| 350-400 | DN 10 ISO-KF |
| PSG017 | |
| 350-430 | DN 16 ISO-KF |
| 350-431 | DN 16 CF-F |
| PSG018 | |
| 350-420 | DN 16 ISO-KF |
| 350-424 | DN 16 CF-F |
| 350-423 | DN 40 CF-F |
Accessories
| Cables to VGC094 | |
| to PSG010 80°C | |
| BG548402-T | 3 m (9.9 ft) |
| BG548403-T | 6 m (19.8 ft) |
| BG548450-T | 10 m (33 ft) |
| BG548451-T | 15 m (49 ft) |
| Cables to VGC094 | |
| to PSG017/018 80°C | |
| BG548308-T | 3 m (9.9 ft) |
| BG548309-T | 6 m (19.8 ft) |
| BG548456-T | 10 m (33 ft) |
| BG548457-T | 15 m (49 ft) |
| Cables to VGC094 | |
| to PSG017/018 250°C | |
| BG548414-T | 3 m (9.9 ft) |
| BG548465-T | 6 m (19.8 ft) |
| BG448047-T | 10 m (33 ft) |
| BG448043-T | 15 m (49 ft) |
| Extensions cables for PSG010/017/018 80°C | |
| BG548466-T | 10 m (33 ft) |
| BG548468-T | 20 m (65 ft) |
| BG548470-T | 30 m (99 ft) |
