INFICON VGC083 (Vacuum Gauge Controller/ Bộ điều khiển đồng hồ đo chân không)
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INFICON VGC083
“Three channel controller for passive gauges”
The Vacuum Gauge Controller VGC083 A/B/C is a three channel gauge controller for vacuum pressure monitoring and controlling from atmosphere down to ultra-high vacuum. The industrial design of VGC083 in combination with a large selection of available passive gauge heads provides a flexible yet reliable and economical choice for vacuum applications requiring a wide vacuum measurement range. Due to the extended compatibility, VGC083 is the ideal solution for existing systems requiring direct drop-in replacements.
VGC083 can be configured to control and read-out up to 3 passive gauge heads among two types of passive sensors design types: one ionization gauge (hot cathode or cold cathode), plus two Pirani gauges.
- VGC083A is designed for use with one passive hot cathode ionization Bayard-Alpert BAG050 (nude) or BAG055 (compact metal enclosed) gauge head and two convection enhanced Pirani PGE050.
- VGC083B can host one passive hot cathode ionization Bayard-Alpert BAG051 (nude) or BAG052/053 (glass tube) gauge head and two PGE050.
- VGC083C can control one passive inverted magnetron cold cathode MAG050/060 gauge head and two PGE050.
Six single pole setpoint relays are assignable to any of the gauge heads. Built-in RS232 and RS485 control interfaces are provided for system integration.
Advantages
- Flexible solution for vacuum pressure monitoring and controlling from atmosphere down to ultra-high vacuum
- Clear and simple operation with three individual bright LED displays
- Parameter, sensor and general settings with softkeys
- User selectable filament, degas electron bombardment or I2R resistive heating for gauge conditioning depending on gauge head type
- Three analog outputs, user assignable to a single gauge or to gauges combinations
- Six assignable single pole double throw setpoint relays
- Ion gauge overpressure protection: sensor 1 can be automatically turned on/off from sensor 2 or 3
- Remote digital I/O sensor and emission on/off, RS232 / RS485 serial communication
- Direct drop in replacement opportunity for Granville-Phillips® Bayard-Alpert Gauge Controller 307 and accessories
(Granville-Phillips® are registered trademarks of MKS Instruments, Andover, MA, USA)
Measurement configurations
Gauges overview
BAG050
| Gauge principle | Bayard-Alpert, hot cathode ionization |
| Gauge type | Electron bombardment (EB) degas nude gauge |
| Pressure range | 2.7×10-11 mbar to 1.3×10-3 mbar |
BAG051
| Gauge principle | Bayard-Alpert, hot cathode ionization |
| Gauge type | Resistive (I2R) degas nude gauge |
| Pressure range | 5.3×10-10 mbar to 1.3×10-3 mbar |
BAG052
| Gauge principle | Bayard-Alpert, hot cathode ionization |
| Gauge type | Resistive (I2R) degas glass enclosed gauge |
| Pressure range | 5.3×10-10 mbar to 1.3×10-3 mbar |
BAG053
| Gauge principle | Bayard-Alpert, hot cathode ionization |
| Gauge type | Resistive (I2R) degas glass enclosed gauge |
| Pressure range | 5.3×10-10 mbar to 1.3×10-3 mbar |
BAG055
| Gauge principle | Bayard-Alpert, hot cathode ionization |
| Gauge type | Mini metal enclosed ionization gauge |
| Pressure range | 1.3×10-9 mbar to 6.7×10-2 mbar |
MAG050
| Gauge principle | Cold cathode |
| Gauge type | Inverted magnetron |
| Pressure range | 2×10-9 mbar to 5×10-3 mbar |
MAG060
| Gauge principle | Cold cathode |
| Gauge type | Inverted magnetron |
| Pressure range | 1×10-10 mbar to 5×10-3 mbar |
PGE050
| Gauge principle | Pirani |
| Gauge type | Convection enhanced |
| Pressure range | 1.3×10-4 mbar to 1333 mbar |
Specifications
VGC083
| Measurement channels | 3 |
| Display | |
| Pressure indication | LED – 3 independent pressure display channels |
| Programming & set-up screen | OLED |
| Measurement range | 1 x 10-11 … 1333 mbar |
| Measurement unit (selectable) | mbar, Torr, Pa |
| Setpoint relays | 6 single-pole double-throw relays (SPDT), user assignable to any of the gauges |
| Contact rating | 5 A at 30 V (dc), 5 A at 250 V (ac), resistive load |
| Analog output | Ion gauge (BAG, MAG), Combination Ion Gauge & PGE, single PGE |
| Interface (digital) | RS232, RS4851) |
| Supply voltage (external) | +20 … +28 V (dc) |
| Operation temperature | +0 … +40 °C |
| 1) Command protocol compatibility with GP307 | |
Part number
Part Number
| 399-700 | VGC083A Vacuum Gauge Controller |
| 399-701 | VGC083B Vacuum Gauge Controller |
| 399-702 | VGC083C Vacuum Gauge Controller |
| 399-710 | Power supply 220 W VGC083 (A & B)1) |
| 399-711 | Power supply 60 W VGC083 (C) |
| 399-714 | Rack mount adapter one VGC083x |
| 399-715 | Rack mount adapter two VGC083x |
| 1) 399-711 when used with BAG055 |
Gauges
| BAG050 | |
| 399-720 | BA nude EB-degas, DN40CF, dual iridium filament (Ir) |
| 399-721 | BA nude EB-degas, DN40CF, dual tungsten filament (W) |
| BAG051 | |
| 399-725 | BA nude I2R, DN40CF, single iridium filament (Ir) |
| 399-726 | BA nude I2R, DN40CF, dual iridium filament (Ir) |
| 399-727 | BA nude I2R, DN40CF, dual tungsten filament (W) |
| BAG052 | |
| 399-740 | BA glass I2R, ¾’’ Kovar metal inlet port, single iridium filament (Ir) |
| 399-741 | BA glass I2R, 1’’ Kovar metal inlet port, single iridium filament (Ir) |
| 399-742 | BA glass I2R, ¾’’ glass inlet port, single iridium filament (Ir) |
| 399-743 | BA glass I2R, 1’’ glass inlet port, single iridium filament (Ir) |
| 399-744 | BA glass I2R, DN 25 ISO-KF, single iridium filament (Ir) |
| 399-745 | BA glass I2R, DN 40 ISO-KF, single iridium filament (Ir) |
| 399-746 | BA glass I2R, DN 16 ISO-CF, single iridium filament (Ir) |
| 399-747 | BA glass I2R, DN 40 ISO-CF, single iridium filament (Ir) |
| BAG053 | |
| 399-750 | BA glass I2R, ¾’’ Kovar metal inlet port, dual tungsten filament (W) |
| 399-751 | BA glass I2R, 1’’ Kovar metal inlet port, dual tungsten filament (W) |
| 399-752 | BA glass I2R, ¾’’ glass inlet port, dual tungsten filament (W) |
| 399-753 | BA glass I2R, 1’’ glass inlet port, dual tungsten filament (W) |
| 399-754 | BA glass I2R, DN 25 ISO-KF, dual tungsten filament (W) |
| 399-755 | BA glass I2R, DN 40 ISO-KF, dual tungsten filament (W) |
| 399-756 | BA glass I2R, DN 16 ISO-CF, dual tungsten filament (W) |
| 399-757 | BA glass I2R, DN 40 ISO-CF, dual tungsten filament (W) |
| BAG055 | |
| 399-760 | BA EB-degas, ¾’’ tube, Yt2O3 coated dual iridium filament (Ir) |
| 399-761 | BA EB-degas, DN 16 ISO-KF, Yt2O3 coated dual iridium filament (Ir) |
| 399-762 | BA EB-degas, DN 25 ISO-KF, Yt2O3 coated dual iridium filament (Ir) |
| 399-763 | BA EB-degas, DN 40 ISO-KF, Yt2O3 coated dual iridium filament (Ir) |
| 399-764 | BA EB-degas, DN 16 CF-R, Yt2O3 coated dual iridium filament (Ir) |
| 399-765 | BA EB-degas, DN 40 CF-R, Yt2O3 coated dual iridium filament (Ir) |
| 399-766 | BA EB-degas, 8 VCR female, Yt2O3 coated dual iridium filament (Ir) |
| PGE050 | |
| 352-500 | Pirani Gauge, DN ISO 16 KF, tungsten filament (W) |
| 352-501 | Pirani Gauge, DN ISO 25 KF, tungsten filament (W) |
| 352-502 | Pirani Gauge, DN ISO 40 KF, tungsten filament (W) |
| 352-503 | Pirani Gauge, DN ISO 16 CF-R, tungsten filament (W) |
| 352-504 | Pirani Gauge, DN ISO 40 CF-R, tungsten filament (W) |
| 352-505 | Pirani Gauge, 4 VCR female, tungsten filament (W) |
| 352-506 | Pirani Gauge, 8 VCR female, tungsten filament (W) |
| 352-507 | Pirani Gauge, 1/8 NPT, tungsten filament (W) |
| MAG050 | |
| 399-840 | Cold Cathode Gauge, DN 25 ISO-KF, FPM sealed |
| 399-841 | Cold Cathode Gauge, DN 40 ISO-KF, FPM sealed |
| 399-842 | Cold Cathode Gauge, DN 40 CF-F, FPM sealed |
| MAG060 | |
| 399-845 | Cold Cathode Gauge, DN 40 ISO-KF, metal sealed |
| 399-846 | Cold Cathode Gauge, DN 40 CF-F, metal sealed |
Cables VGC083A
| Cables to BAG050 | |
| 50 °C | |
| 399-780 | 3 m (9.9 ft) |
| 399-781 | 8 m (25 ft) |
| 399-782 | 15 m (50 ft) |
| 200 °C | |
| 399-770 | 3 m (9.9 ft) |
| 399-771 | 8 m (25 ft) |
| 399-772 | 15 m (50 ft) |
| 399-779 | Touch protection cover for cables 200 °C (BAG050, BAG051) |
| Cables to BAG055 | |
| 50 °C | |
| 399-810 | 3 m (9.9 ft) |
| 399-811 | 8 m (25 ft) |
| 399-812 | 15 m (50 ft) |
| 200 °C | |
| 399-860 | 3 m (9.9 ft) |
| 399-861 | 8 m (25 ft) |
| 399-862 | 15 m (50 ft) |
| Cables to PGE050 | |
| 50 °C | |
| 399-580 | 3 m (9.9 ft) |
| 399-581 | 8 m (25 ft) |
| 399-582 | 15 m (50 ft) |
| 150 °C | |
| 399-520 | 3 m (9.9 ft) |
| 399-521 | 8 m (25 ft) |
| 399-522 | 15 m (50 ft) |
| 399-767 | Cable adaptor MKS / GP® 355 Micro-Ion® to VGC083A |
Cables VGC083B
| Cables to BAG051 | |
| 50 °C | |
| 399-780 | 3 m (9.9 ft) |
| 399-781 | 8 m (25 ft) |
| 399-782 | 15 m (50 ft) |
| 200 °C | |
| 399-770 | 3 m (9.9 ft) |
| 399-771 | 8 m (25 ft) |
| 399-772 | 15 m (50 ft) |
| 399-779 | Touch protection cover for cables 200 °C (BAG050, BAG051) |
| Cables to BAG052/053 | |
| 50 °C | |
| 399-790 | 3 m (9.9 ft) |
| 399-791 | 8 m (25 ft) |
| 399-792 | 15 m (50 ft) |
| Cables to PGE050 | |
| 50 °C | |
| 399-580 | 3 m (9.9 ft) |
| 399-581 | 8 m (25 ft) |
| 399-582 | 15 m (50 ft) |
| 150 °C | |
| 399-520 | 3 m (9.9 ft) |
| 399-521 | 8 m (25 ft) |
| 399-522 | 15 m (50 ft) |
Cables VGC083C
| Cables to MAG050/060 | |
| 80 °C | |
| 399-820 | 3 m (9.9 ft) |
| 399-821 | 8 m (25 ft) |
| 399-822 | 15 m (50 ft) |
| 250 °C | |
| 399-830 | 3 m (9.9 ft) |
| 399-831 | 8 m (25 ft) |
| 399-832 | 15 m (50 ft) |
| Cables to PGE050 | |
| 50 °C | |
| 399-580 | 3 m (9.9 ft) |
| 399-581 | 8 m (25 ft) |
| 399-582 | 15 m (50 ft) |
| 150 °C | |
| 399-520 | 3 m (9.9 ft) |
| 399-521 | 8 m (25 ft) |
| 399-522 | 15 m (50 ft) |
