INFICON IM540 (Vacuum Gauge Controller/ Bộ điều khiển đồng hồ đo chân không)
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INFICON IM540
“Versatile hot cathode ionization passive gauge controller”
The Vacuum Gauge Controller IM540 is a versatile ionization gauge controller offering complete vacuum measurement and control in the range between 10-12 mbar and atmospheric pressure. Depending on the application and user’s needs, IM540 is your one-solution as it may combine up to 4 different principles of vacuum measurement – Pirani, capacitive diaphragm, Bayard-Alpert and Extractor. This controller allows for a reliable and complete integration in complex process control systems.
Advantages
- Supports the operation of the IE414 (Bayard-Alpert) and the IE514 (extractor) hot cathode ionization gauges
- Two active gauges from the PSG5xx (Pirani) and CDG (Capacitance diaphragm) active gauge lines can be connected and operated
- Simple operation with menu guided display for parameter, sensor or general settings
- Built-in RS232 communication interface, optional PROFIBUS DP interface board (IF 540 P)
- Two set points (optional 7) with adjustable hysteresis
- High resolution – 16 bit A/D converter
- 2 programmable 0 to 10 V chart recorder outputs
Specifications
IM540
| Measurement channel | 3 |
| Display | LCD, LED backlight |
| Display rate | 4 s-1 |
| Measurement range | 1 x 10-12 … 1100 mbar |
| Measurement unit (selectable) | mbar, Torr, Pa, hPa, Micron, V |
| Measurement range switching | automatic or decade pre-select |
| Chart recorder outputs | logarithmic 0 to 10 V (1 V / dec) or linear 0 to 10 V |
| Interface | RS232C, PROFIBUS (with IF540P) |
| Switching thresholds (single operation or interval) | 2 with floating changover contact |
| Power supply | 90 … 264 V (ac) |
| Frequency | 47 … 63 Hz |
| Operation temperature | +5 … +40°C |
Part Number
Part Number
| 399-660 | IM540 Vacuum Gauge Controller |
Accessories
| 399-661 | IE414 DN 40 CF-F |
| 399-676 | Replacement cathode IE414 |
| 399-663 | IE514 DN 40 CF-F |
| 399-677 | Replacement cathode IE514 |
| Interface board | |
| 399-670 | IF540P PROFIBUS DP Interface board |
| Gauge head cables to IE414/514, 80 °C | |
| 399-680 | 3 m |
| 399-681 | 5 m |
| 399-682 | 10 m |
| 399-685 | 50 m |
| Gauge head cables to IE414/514, 200 °C | |
| 399-686 | 3 m |
| 399-687 | 5 m |
| 399-688 | 10 m |
| 399-690 | 50 m |
Gauges Overview
IE414
| Gauge principle | Bayard-Alpert, hot cathode ionization |
| Pressure range | 2×10-11 … 1×10-2 mbar (with modular emission current) |
| Bake-out temperature | ≤400 °C |
IE514
| Gauge principle | Extractor, hot cathode ionization |
| Pressure range | 2×10-12 … 1×10-4 mbar |
| Bake-out temperature | ≤400 °C |
PSG50x, PSG51x-S
| Gauge principle | Pirani (active gauge type) |
| Pressure measurement range | 8×10-4 mbar to ATM |
| Bake-out temperature range | ≤80 / 250 °C (model dependent) |
CDG025D, CDG045D
| Gauge principle | Capacitance diaphragm (active gauge type) |
| Pressure measurement range | 4 user-selectable pressure decades |
| Bake-out temperature range | model-dependent |
Measurement configurations
Channel 1 or 2
| Gauge principle | Hot cathode ionization gauge |
| Gauge model | IE414 (Bayard-Alpert) or IE514 (Extractor) Two gauges can be connected simultaneously with automatic switching (backup operation) |
Channel 3 + 4
| Gauge principle | Active gauge: Pirani Capacitance diaphragm |
| Gauge model | PSG50x PSG510x CDG025D, CDG045D |
Interface board
IF 540 P
| Communication protocol | PROFIBUS interface and relays (1.5 A) |
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