INFICON Edge® CDG025D2 Capacitance Manometers (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)

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Mô tả sản phẩm

INFICON Edge® CDG025D2 Capacitance Manometers

“Full scale 0.1 … 1000 Torr / mbar”

INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.

The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.

Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.

Advantages

Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Corrosion resistant ceramic sensor
Excellent long term signal stability
Temperature compensated
Sensor protected from contamination
Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

Etch, PVD and other semiconductor production processes
Data storage and display manufacturing equipment
Industrial vacuum equipment
General high accuracy pressure measurement

Specifications

1000 Torr, 1100 mbar

500 … 10 Torr / mbar

1 Torr / mbar

0.25 Torr / mbar

0.1 Torr / mbar

Accuracy	% of reading	0.2

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Download full specifications

LEAK DETECTORS

UHP GAS EQUIPMENT

VACUUM EQUIPMENT

THIN FILM EQUIPMENT

SẢN PHẨM KHÁC

INFICON Edge® CDG025D2 Capacitance Manometers (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)

INFICON Edge® CDG025D2 Capacitance Manometers

“Full scale 0.1 … 1000 Torr / mbar”

Advantages

Typical applications

Specifications

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