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LEAK DETECTORS

UHP GAS EQUIPMENT

VACUUM EQUIPMENT

THIN FILM EQUIPMENT

SẢN PHẨM KHÁC

1127_MAG470

INFICON MAG470 Cold Cathode Gauges (Vacuum Pressure Gauges/ Bộ đo áp suất chân không)

Giá bán: Liên Hệ.

  • Mô tả sản phẩm

INFICON MAG470

“Inverted Magnetron Gauges”

The Inverted Magnetron Vacuum Gauge MAG470 is for all ultra high vacuum applications. The measurement range is from 5×10-11 mbar to 1×10-2 mbar.

Advantages

  • No filament to burn out
  • Extended version, sensor bakeout up to 250°C
  • Excellent ignition properties
  • Easy to clean
  • Metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

Typical applications

  • Ultra high vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

Specifications

MAG470

Measurement range (air, N2)mbar
Torr		5×10-11 … 1×10-2
3.8×10-11 … 7.5×10-3
Accuracy
1×10-9 … 1×10-3 mbar% of reading≈±30
Repeatability
1×10-9 … 1×10-3 mbar% of reading≈±5
Temperature
Operation (ambient)°C+5 … +55
Storage°C-40 … +65
Bake-out°C250 1)
Supply voltage
At gaugeV (dc)+15 … +30
At supply unit with max. cable length (3)V (dc)+16 … +30
RippleV (p-p)≤1
Power consumptionW≤2
Materials exposed to vacuumStainless steel, Al2O3, Ag
(1) Without electronics magnetic shielding
(2) 250°C in defined area, see dimension
(3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable

MAG470 extended

Measurement range (air, N2)mbar
Torr		5×10-11 … 1×10-2
3.8×10-11 … 7.5×10-3
Accuracy
1×10-9 … 1×10-3 mbar% of reading≈±30
Repeatability
1×10-9 … 1×10-3 mbar% of reading≈±5
Temperature
Operation (ambient)°C+5 … +55
Storage°C-40 … +65
Bake-out°C250 2)
Supply voltage
At gaugeV (dc)+15 … +30
At supply unit with max. cable length (3)V (dc)+16 … +30
RippleV (p-p)≤1
Power consumptionW≤2
Materials exposed to vacuumStainless steel, Al2O3, Ag
(1) Without electronics magnetic shielding
(2) 250°C in defined area, see dimension
(3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable

Part Number

Part Number

MAG470
Part NumberDescription
399-360MAG470 DN 40 CF-F, FCC
MAG470 extended
Part NumberDescription
399-361MAG470 DN 40 CF-F, extendet

Accessories

MAG470
Part NumberDescription
351-023Magnetic shield
MAG470 extended
Part NumberDescription
351-023Magnetic shield

Spare Parts

MAG470
Part NumberDescription
351-997MPG401 Maintenance set
351-990Repair set IKR 060/070/26x/270 MAG470
351-995MxG40x/50x Spare parts ignition aid (10)
351-994MPG40x Ignition tool set
MAG470 extended
Part NumberDescription
351-990Repair set IKR 060/070/26x/270 MAG470
351-995MxG40x/50x Spare parts ignition aid (10)
351-994MPG40x Ignition tool set
351-997MPG401 Maintenance set

 

 

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