INFICON Trigon™ BAG552 Hot Ionization Gauges

“Medium to Ultra High Vacuum Single Gauge”

For applications that require stand-alone hot ion gauge technology, the Trigon™ family includes the single technology Bayard-Alpert Hot Ion Gauge BAG552.

The BAG552 is designed for vacuum measurement of gases in the pressure range 5 × 10^-10 … 2 x 10^-2 mbar. The supported dual filament offers superior accuracy, repeatability and longevity. The BAG552 can also be operated in conjunction with the INFICON Vacuum Gauge Controller series VGC501, VGC502, VGC503.

VacXplor™ Software

VacXplor, our modular user software is designed to enhance your experience with INFICON Trigon Gauges. VacXplor offers a unified interface, dynamic data visualization, and advanced customization options, all without the need for administrator rights for installation.

Advantages

• Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
• 2 filaments for Bayard-Alpert system
• Galvanic isolated electronics to avoid electric stray current
• Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
• Extended bakeability due to removable calibration data chips
• Set point relays
• Bright & big OLED display (90° rotateable) with user interface
• Analog output, RS232C serial interface, EtherCAT®
• Usable in conjunction with VGC50x Controller series
• RoHS compliance

Typical applications

• Pressure measurement in Semiconductor processes
• Industrial coating
• General vacuum measurement and control on systems in the high to ultra high vacuum range

Specifications

Measurement range (air, O2, CO, N2)	5 × 10-10 … 2 × 10-2 mbar
Accuracy
1 × 10-8 … 2 × 10-2 mbar	±15 of reading
Repeatability	5% of reading, 10-8 … 2 × 10-2 mbar (after 10 min. stabilization)
Materials exposed to vacuum	stainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten

Part Number

Part Number

Part Number	Description
352-420	BAG552 Spare sensor head, 25KF
352-421	BAG552 Spare sensor head, 40CF