Thiết bị giám sát lắng đọng Deposition Monitor INFICON SQM-160
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Deposition Monitor INFICON SQM-160
Measure rate and thickness in thin film deposition processes
The SQM-160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals.
Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable.
In addition, Frequency or Mass displays can be selected. Four relay outputs allow the SQM-160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings.
Features
- Two measurement channels standard, an additional four optional
- Analog outputs for rate/thickness recording
- High resolution option: 0.03Hz at 10 readings/sec
- RS-232 standard, USB or Ethernet optional
Specifications
SQM-160 Standard Resolution
| QCM Sensor Inputs | Standard: 2; optional: 4 |
| Measurement Frequency Range | Adjustable: 1.0 MHz minimum 6.5 MHz maximum |
| Thickness and rate resolution/measurement (1) | ± 0.37 Å |
| Stored Films | 99 |
| Digital Inputs/Outputs | Four inputs, four relay outputs |
| (1)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.10 s measurement interval | |
SQM-160 High Resolution
| QCM Sensor Inputs | Standard: 2; optional: 4 |
| Measurement Frequency Range | Adjustable: 1.0 MHz minimum 6.5 MHz maximum |
| Thickness and rate resolution/measurement (1) | ± 0.037 Å |
| Stored Films | 99 |
| Digital Inputs/Outputs | Four inputs, four relay outputs |
| (1)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.10 s measurement interval | |
Accessories
Accessories
| Front Load Single Sensor |
| Front Load Dual Sensor |
| Cool Drawer Single Sensor |
| Cool Drawer Dual Sensor |
| Easy Rate Single Sensor |
| Easy Rate Dual Sensor |
| UHV Bakeable Sensor |
| Sputtering Sensor |
Replacement Parts
| Part Number | Description |
| 782-900-014 | 19 in. Rack Mount Kit for two SQM-160 or CI-100 instruments |
| 782-502-096-G1 | USB option card |
| 782-502-097-G1 | Ethernet option card |
| Oscillator kits | (Includes oscillator and cables) |
| 783-500-109-10 | 3 m (10 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable |
| 783-500-109-25 | 7.6 m (25 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable |
| 783-500-109-50 | 15.2 m (50 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable |
| 783-500-109-75 | 22.8 m (75 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable |
| Oscillator Only | (No cables included) |
| 783-500-013-G1 | OSC-100 oscillator only (no cables) |
| Cables | |
| 782-902-011 | 15.2 cm (6 in.) BNC cable, male/female |
| 782-902-012-10 | 3 m (10 ft.) BNC cable, male/male |
| 782-902-012-25 | 7.6 m (25 ft.) BNC cable, male/male |
| 782-902-012-50 | 15.2 m (50 ft.) BNC cable, male/male |
| 782-902-012-75 | 22.8 m (75 ft.) BNC cable, male/male |
