Máy quang phổ khối Mass Spectrometers INFICON Transpector MPH
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Mass Spectrometers INFICON Transpector® MPH
Unparalleled Performance for Increased Yields and Maximum Uptime
The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market.
INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the reliability you have come to expect from INFICON Transpector Gas Analyzers.
Features
Max. Data Rate of 1.8 ms per point for Analog Scans and Selected Peaks
TCP/IP Ethernet connectivity
Dual filaments
Field replaceable Electron Multiplier
Combined anode, cathode and repeller filament kit
Shorter sensors minimize installed footprint
Nine-decade dynamic range
MDPP of <2E-15 Torr (100 amu)
Increased Signal-to-Noise ratio
Interchangeable sensors and electronics
Sensors are assembled, tested and double bagged in a cleanroom environment
RoHS Compliant
Specifications
MPH100M
Mass Range
100 amu
Min. Detectable Partial Pressure
2E-15 Torr
Sensitivity (FC)
6E-4 A/Torr
Sensitivity (EM)
500 A/Torr
Max. Operating Pressure
5E-4 Torr
MPH100F
Mass Range
100 amu
Min. Detectable Partial Pressure
3E-13 Torr
Sensitivity (FC)
6E-4 A/Torr
Sensitivity (EM)
NA
Max. Operating Pressure
5E-4 Torr
MPH200M
Mass Range
200 amu
Min. Detectable Partial Pressure
3E-15 Torr
Sensitivity (FC)
5E-4 A/Torr
Sensitivity (EM)
500 A/Torr
Max. Operating Pressure
5E-4 Torr
MPH200F
Mass Range
200 amu
Min. Detectable Partial Pressure
4E-13 Torr
Sensitivity (FC)
5E-4 A/Torr
Sensitivity (EM)
NA
Max. Operating Pressure
5E-4 Torr
MPH300M
Mass Range
300 amu
Min. Detectable Partial Pressure
4E-15 Torr
Sensitivity (FC)
4E-4 A/Torr
Sensitivity (EM)
250 A/Torr
Max. Operating Pressure
5E-4 Torr
MPH300F
Mass Range
300 amu
Min. Detectable Partial Pressure
5E-13 Torr
Sensitivity (FC)
4E-4 A/Torr
Sensitivity (EM)
NA
Max. Operating Pressure
5E-4 Torr
Accessories
961-021-G1
Power Supply Kit 80 – 250 VAC / 4 ft (1.2m) US plug
961-021-G2
Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3
Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4
Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5
Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6
Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
