INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.
Transpector CPM 3 provides proven return on investment to our partners through:
Industry Leading Measurement Technology Robust and Adaptive Architecture Ease of Maintenance Superior Product Support Features Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis ALD-Ready with 1.8 ms per point (555 points per second) measurement speed Field-proven durability and reliability in the most demanding CVD and Etch applications Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts Compact size—allows for easy integration into production semiconductor equipment Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching Specifications
100 AMU CPM Total Pressure Range 5E-7 – 1E-3 Torr Detection Limit < 1 ppm Process Pressure Range 1E-8 Torr – 1.2 atm Sensitivity (Low Emission) > 4E-6 Amps/Torr Sensitivity (High Emission) > 2E-5 Amps/Torr
200 AMU CPM Total Pressure Range 5E-7 – 1E-3 Torr Detection Limit < 2 ppm Process Pressure Range 1E-8 Torr – 1.2 atm Sensitivity (Low Emission) > 2E-6 Amps/Torr Sensitivity (High Emission) > 1E-5 Amps/Torr
300 AMU CPM Total Pressure Range 5E-7 – 1E-3 Torr Detection Limit < 4 ppm Process Pressure Range 1E-8 Torr – 1.2 atm Sensitivity (Low Emission) > 1E-6 Amps/Torr Sensitivity (High Emission) > 5E-6 Amps/Torr
Consumables
100 AMU CPM Part Number Description 059-0196 NI-4-VCR-2, 1/4″ VCR GASKET NI 059-0400 Replacement c-ring 070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) 923-418-G1 CPM Replacement Diaphragm Kit 2 Stage 923-706-G10 30 Torr HexBlock orifice (10.5 micron) 923-706-G3 10 Torr HexBlock orifice (20 micron) 923-706-G4 1 Torr HexBlock orifice (62 micron) 923-706-G6 10 mtorr HexBlock orifice (750 micron) 923-706-G7 360 mtorr HexBlock orifice (120 micron) 923-706-G8 15 mtorr HexBlock orifice (350 micron) 923-706-G9 3 Torr HexBlock orifice (35 micron) 923-707-G1 10 Torr HexBlock sniffer (5 cm length) 923-707-G2 100 Torr HexBlock sniffer (5 cm length) 923-707-G3 7 Torr HexBlock sniffer 961-707-G1 Electron Multiplier Kit, Spare 964-710-G1 Filament Kit CPM Tungsten 964-710-G2 Filament Kit CPM Coated 964-711-G1 Ion Source Kit CPM Tungsten 964-711-G2 Ion Source Kit CPM Tungsten w/Liner 964-712-G1 Ion Source Kit CPM Coated 964-712-G2 Ion Source Kit CPM Coated w/Liner
200 AMU CPM Part Number Description 059-0196 NI-4-VCR-2, 1/4″ VCR GASKET NI 059-0400 Replacement c-ring 070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) 923-418-G1 CPM Replacement Diaphragm Kit 2 Stage 923-706-G10 30 Torr HexBlock orifice (10.5 micron) 923-706-G3 10 Torr HexBlock orifice (20 micron) 923-706-G4 1 Torr HexBlock orifice (62 micron) 923-706-G6 10 mtorr HexBlock orifice (750 micron) 923-706-G7 360 mtorr HexBlock orifice (120 micron) 923-706-G8 15 mtorr HexBlock orifice (350 micron) 923-706-G9 3 Torr HexBlock orifice (35 micron) 923-707-G1 10 Torr HexBlock sniffer (5 cm length) 923-707-G2 100 Torr HexBlock sniffer (5 cm length) 923-707-G3 7 Torr HexBlock sniffer 961-707-G1 Electron Multiplier Kit, Spare 964-710-G1 Filament Kit CPM Tungsten 964-710-G2 Filament Kit CPM Coated 964-711-G1 Ion Source Kit CPM Tungsten 964-711-G2 Ion Source Kit CPM Tungsten w/Liner 964-712-G1 Ion Source Kit CPM Coated 964-712-G2 Ion Source Kit CPM Coated w/Liner
300 AMU CPM 300 AMU CPM Part Number Description 059-0196 NI-4-VCR-2, 1/4″ VCR GASKET NI 059-0400 Replacement c-ring 070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) 923-418-G1 CPM Replacement Diaphragm Kit 2 Stage 923-706-G10 30 Torr HexBlock orifice (10.5 micron) 923-706-G3 10 Torr HexBlock orifice (20 micron) 923-706-G4 1 Torr HexBlock orifice (62 micron) 923-706-G6 10 mtorr HexBlock orifice (750 micron) 923-706-G7 360 mtorr HexBlock orifice (120 micron) 923-706-G8 15 mtorr HexBlock orifice (350 micron) 923-706-G9 3 Torr HexBlock orifice (35 micron) 923-707-G1 10 Torr HexBlock sniffer (5 cm length) 923-707-G2 100 Torr HexBlock sniffer (5 cm length) 923-707-G3 7 Torr HexBlock sniffer 961-707-G1 Electron Multiplier Kit, Spare 964-710-G1 Filament Kit CPM Tungsten 964-710-G2 Filament Kit CPM Coated 964-711-G1 Ion Source Kit CPM Tungsten 964-711-G2 Ion Source Kit CPM Tungsten w/Liner 964-712-G1 Ion Source Kit CPM Coated 964-712-G2 Ion Source Kit CPM Coated w/Liner
Spare Parts
100 AMU CPM Part Number Description 032-0079 Turbo Molecular Pump (w/CF40 flange) 059-0400 Replacement c-ring 915-724-G1 Package of three spare liners (used only with liner configured ion source) 922-204-G1 Capillary assembly – 1.5 m 922-204-G3 Capillary assembly – 3 m 923-403-P2 CPM Valve Controller Manifold Assembly 923-417-G1 Foreline Protection Kit, CPM 923-710-G1 HexBlock orifice replacement tools 923-711-G1 HexBlock valve replacement kit 923-712-G1 Spare HexBlock orifice gasket (pack of five) 923-723-G2 2 Stage Diaphragm Foreline Pump 964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr) 964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr) 964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr) 964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr) 964-230-G1 CPM Cable Box Assembly 964-403-P1 CPM Manifold Heater 964-603-G2 CPM Controller Box 964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable 964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable 964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable 964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
200 AMU CPM Part Number Description 032-0079 Turbo Molecular Pump (w/CF40 flange) 059-0400 Replacement c-ring 915-724-G1 Package of three spare liners (used only with liner configured ion source) 922-204-G1 Capillary assembly – 1.5 m 922-204-G3 Capillary assembly – 3 m 923-403-P2 CPM Valve Controller Manifold Assembly 923-417-G1 Foreline Protection Kit, CPM 923-710-G1 HexBlock orifice replacement tools 923-711-G1 HexBlock valve replacement kit 923-712-G1 Spare HexBlock orifice gasket (pack of five) 923-723-G2 2 Stage Diaphragm Foreline Pump 964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr) 964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr) 964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr) 964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr) 964-230-G1 CPM Cable Box Assembly 964-403-P1 CPM Manifold Heater 964-603-G2 CPM Controller Box 964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable 964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable 964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable 964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
300 AMU CPM Part Number Description 032-0079 Turbo Molecular Pump (w/CF40 flange) 059-0400 Replacement c-ring 915-724-G1 Package of three spare liners (used only with liner configured ion source) 922-204-G1 Capillary assembly – 1.5 m 922-204-G3 Capillary assembly – 3 m 923-403-P2 CPM Valve Controller Manifold Assembly 923-417-G1 Foreline Protection Kit, CPM 923-710-G1 HexBlock orifice replacement tools 923-711-G1 HexBlock valve replacement kit 923-712-G1 Spare HexBlock orifice gasket (pack of five) 923-723-G2 2 Stage Diaphragm Foreline Pump 964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr) 964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr) 964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr) 964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr) 964-230-G1 CPM Cable Box Assembly 964-403-P1 CPM Manifold Heater 964-603-G2 CPM Controller Box 964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable 964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable 964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable 964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
