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8165_Quantus_HP100

Máy phân tích khí quang học Optical Gas Analyzers INFICON Quantus HP100

Giá bán: Liên Hệ.

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Optical Gas Analyzers INFICON Quantus® HP100

Real-time Leak Detection, Endpoint Detection and Process Monitoring

INFICON Quantus HP100 gas analyzer is based on Self-Plasma Optical Emission Spectroscopy (SPOES) technology and is designed to provide real-time leak detection, endpoint detection and process monitoring during semiconductor manufacturing. Quantus HP100 has excellent sensitivity, a compact form factor and offers wide operational pressure range without costly pumps, making it well suited for process monitoring and protection in most semiconductor tools.

Features

  • Operating range of 1 Torr – 450 Torr for Argon and 1 Torr – 120 Torr for Nitrogen (Varies for other gas species)
  • Low detection limits <1 ppm
  • Easy installation using a standard KF25 connection
  • Fast sampling (20 Hz maximum)
  • Small footprint (H x W x L): 6.4 x 6.0 x 8.3 in. [162 x 153 x 210 mm]
  • Low maintenance, no pumps or consumables required
  • Convenient field-replaceable plasma cell
  • Worldwide expert support for your particular process needs

Specifications

Operating pressure1 Torr – 450 Torr (application dependent)
Spectrometer performance200 to 850 nanometer wavelengths (UV-VIS) 16-bit full-scale resolution, 3648 pixels
Detection limit< 1 ppm (application dependent)
Exposure timeMinimum of 1 ms
Vacuum fittingKF25