Máy phân tích khí quang học Optical Gas Analyzers INFICON Augent OPG550
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Optical Gas Analyzers INFICON Augent® OPG550
Optical Plasma Vacuum Gauge
The INFICON Augent® Optical Plasma Gauge is a compact and intelligent solution for vacuum monitoring.
Augent combines two sensor technologies into one compact device for gas type monitoring from 1 x 10-7 to 5 mbar and to measure total pressure from 1 x 10-7 mbar to atmosphere at the same time. Augent is protected by an integrated Pirani sensor to switch off plasma above 20 mbar. The fast optical measurement principle allows the detection of in principle any type of gas.
Advantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
3D Model
Zoom and pan for a closer look at the Augent® OPG550
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
Tutorial Videos
How to clean the sensor?
How to replace the sensor?
Specifications
| Measurement range N2 | mbar Torr | 1×10-7 … 5 (7.6×10-8 … 3.8) |
| Accuracy total pressure reading N2 | ||
| 1 x 10-7 … 100 mbar | % of reading | 30 |
| 100 … 1000 mbar | % of reading | 50 |
| Repeatability total pressure reading N2 | ||
| 1 x 10-7 … 100 mbar | % of reading | 5 |
| Temperature | ||
| Operation (ambient) | °C | +5 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange with electronic unit | °C | <80 |
| Bakeout at flange w/o electronic unit | °C | <120 |
| Supply voltage | ||
| At gauge | V (dc) | +14.5 … +30 |
| Ripple | V (p-p) | <1 |
| Power consumption | W | <5 |
| Fuse to be connected | AT | 1 |
| Materials exposed to vacuum | ||
| General | General | Al2O3, Stainless seel 1.4435 |
| Anode | Anode | Molybdenum |
| Ionization chamber | Ionization chamber | Titanium, stainless steel 1.4016 |
| Ignition aid | Ignition aid | Stainless steel 1.4310 |
Part Number
Accessories
| Part Number | Description |
| 303-333 | Diagnostic cable for Diagnostic Port (RS232), 2 m |
| 351-051 | 24 V (dc) power supply with analog out and RS232 line |
| 351-052 | Optical window cleaning kit (for gauges with PN 3OF1-xxx-xxxx) |
Spare Parts
| Part Number | Description |
| 351-594 | Replacement sensor DN ISO 16 KF |
| 351- 595 | Replacement sensor DN 16 CF-R |
| 351-597 | Replacement sensor DN ISO 25 KF |
| 351-598 | Replacement sensor DN ISO 40 KF |
| 351-599 | Replacement sensor DN ISO 40 CF-F |
| 351-596 | Replacement sensor 8 VCR female |
| 351-055 | Spare ion chamber TI – OPG550 |
| 351-995 | MxG40x/50x, OPG550 Spare parts ignition aid (10) |
Part Number
