Máy dò tìm rò rỉ (máy kiểm tra rò rỉ) Helium Leak Detector CANON ANELVA
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- Mô tả sản phẩm
Canon Anelva Helium Leak Detector
M-212LD M-212LD-D M-222LD M-222LD-D M-232LD M-222LD-H M-222LD-D-H M-222LD-D-H_500
■Portable Series
HELEN M-212LD (-D) / M-222LD (-D) (-H) (_500) / M-232LD
■ Summary
The portable series products have been conceptually developed with emphasis on compactness, lightness, and portability.
The M-212LD is a lightweight, general-purpose model
that has been specifically designed for use in the field. The M-222LD is equipped with a large roughing pump. It can perform leak tests of large vacuum containers by itself without the need of the equipment’s pump. High sensitivity type M-222LD-H/LD-D-H adopt new platform (TMP, valve block) and offer even higher sensitivity and response than other models.
The M-222LD-D-H_500 equipped with 500L/min dry pump optimum for leak tests of large vacuum equipment is newly line-upped.
The M-232LD is a dedicated machine focusing on the sniffer method. It is ideally suited for use in gas pipes and pressurization components.
Furthermore, the “-D” models use a dry pump pumping system to keep the vacuum equipment (vacuum components) free of oil contamination.
Select the best model for the intended application from the variety of models provided in this series.
M-212LD Compact
- Suitable for inspection and field maintenance of
various vacuum equipment
- Compact leak detector for various vacuum components
M-212LD-D Compact & Dry
- Low particle compact and dry type with diaphragm
- Ideal for use in cleanrooms
M-222LD High Power
- Maintenance of various vacuum equipment
- Leak test of various large-scale vacuum containers
such as accelerators
- Leak system analyzer
M-222LD-D High Power & Dry
- Supports clean room
- Enables oil-free leak tests
- Maintenance of various vacuum equipment
M-232LD Sniffer
- Leak test of gas supply systems, vacuum components,
and piping components
- Leak test of automotive parts and air conditioning freezers
- Leak test of food and pharmaceutical packages
- Leak test of water and various gas pipes
■ Features
1. Simple operation
From equipment startup to measurement with just a touch of a button. Anyone can easily perform leak tests. Simply set the conditions appropriate for the test specimen. Sensitivity calibration is performed automatically.
2. Industry leading sensitivity, stability, and response
In addition to using a 180° magnetic deflection mass spectrometer tube, an MCP (Micro-
Channel Plate with a secondary-
electron multiplier) is installed for amplifying helium ions. As a result, even the standard models can
achieve a sensitivity as high as 10-12Pa•m3/s. This is also coupled with high stability throughout the long-term service period.
3. Portable
The large casters and handle make the units ideal for field maintenance use.
4. Durable robust design
The units are equipped with a variety of safety features. They respond immediately to operator errors and abnormal environmental conditions.
A long life tungsten filament is used to enable long term high-sensitivity measurement. The robust design enables the units to be installed in systems that operate 24 hours.
5. Wide range of functions
Just like the simple operation of the conventional system, measurements can be performed using the start/stop button. Even those customers requiring complicated configurations to satisfy their specific needs can be easily supported. A 4.1 inch color LCD is used for the display unit. A color LCD has been adopted in order to increase legibility. The standard, status, and trend screens are shown below.
As an example of other functions, reading the internal temperature variations and compensating for temperature drift of the preamplifier have improved the measurement accuracy.
■ Hand controller
■ Technical data
■Specifications
Standard type
| Type | M-212LD | M-212LD-D | M-222LD | M-222LD-D | M-232LD |
| Version | Compact | Compact & Dry | High power | High power & Dry | Sniffer |
| Quantitative measurement range (Pa•m 3/s) | 10-12 to 10–3 | 10-12 to 10–3 | 10-12 to 10–3 | 10-12 to 10–3 | 10-8 to 10–1 (10-2 to 105ppm) |
| Inlet port exhaust speed (He) (L/s) | 0.5 (Gross Mode) 2.0 (middle Mode) | 1.0 (middle2 Mode) 4.0 (middle1 Mode) 7.0 (Fine Mode) | 1.8 (Gross Mode) 2.0 (middle Mode) | 2.0 (Gross Mode) 2.0 (middle Mode) | Probe suction speed 0.3Pa•m3/s |
| Inlet port shape | NW25 (ISO) | – | |||
| Main pump | TMP 50L/s | ||||
| 50L/s | 70L/s | 50L/s | |||
| Roughing pump | RP30L/min | Dry pump15L/min | RP 236L/min | Dry scroll pump 250L/min | RP30L/min+ Diaphragm pump |
| External interface | RS232C Analog output (2 points) • standard I/O | ||||
| Display | 4.1inch color LCD | ||||
| Sniffer probe | 981-9370 (option) | *1 | 981-9371 (option) | Standard | |
| Power requirements*2 | AC100 to 120V, 8A | AC100 to 120V, 6.3A | AC100V, 15A | AC100 to 120V, 15A*3 AC200 to 240V, 10A | AC100 to 120V, 8A |
| Dimensions(WxHxD) (mm) | 435x487x364 | 462x867x715 | 435x470x363 | ||
| Weight (kg) | 42 | 39 | 75 | 42 | |
*1: Please consult us.
*2: Please specify voltage when ordering.
*3: The attached fuse replacement and input cable replacement are required.
■Dimensions
■Specifications
High sensitivity type
| Type | M-222LD-H | M-222LD-D-H | M-222LD-D-H_500 |
| Version | High power | High power & Dry | High power & Dry(500) |
| Quantitative measurement range (Pa•m3/s) | 10-13 to 10–3 | 10-12 to 10–3 | |
| Inlet port exhaust speed(He) (L/s) | 1.8 (Gross Mode) 4.0 (middle Mode) 7.0 (Fine Mode) | 2.0 (Gross Mode) 4.0 (middle Mode) 7.0 (Fine Mode) | 3.5 (Gross Mode) 4.0 (middle Mode) 7.0 (Fine Mode) |
| Inlet port shape | NW25 (ISO) | ||
| Main pump | TMP 70L/s | ||
| Roughing pump | RP 236L/min | Dry scroll pump 250L/min | Multi-stage roots pump500L/min Bypass pumping |
| External interface | RS232C Analog output (2 points) • standard I/O | ||
| 4.1inch color LCD | |||
| Power requirements*1 | AC100V, 15A | AC100 to 120V, 15A*2 AC200 to 240V, 10A | AC100 to 120V, 15A*3 AC200 to 240V, 10A |
| Dimensions(WxHxD) (mm) | 462x867x715 | ||
| Weight (kg) | 75 | ||
| Protection standard | CE, RoHS | RoHS | |
*1: Please specify voltage when ordering.
*2: The attached fuse replacement and input cable replacement are required.
*3: It depends on the specification at the time of ordering.
■Dimensions
■Option
Filament maintenance kit Various cart Sniffer probe Flex tubes and reducers (Various types are available)
Calibrated leak Bombing system PC software Helium spray gun
(5×10-9 to 2×10-3 Pa•m3/s)
■Ordering Information
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