Cảm biến tinh thể chịu nhiệt INFICON UHV Bakeable Sensor
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Mô tả sản phẩm
INFICON UHV Bakeable Sensor
INFICON UHV Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450° C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion.
Features
High temperature braze & welded construction
Bakeout temperatures to 450° C
Crystal shutter (option)
Front load crystal holder
Easy installation
CF40 feedthrough
No brazing or welding to feedthrough required
Sensor/feedthrough combination welded to customer specified lengths
Specifications
Bakeable Sensor w/ Shutter
Maximum temperature
400° C continuous (for bake only; water flow recommended for actual deposition monitoring)
Crystal exchange
Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.
Water, air and coax lines
0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
Bakeable Sensor w/out Shutter
Maximum temperature
450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
Crystal exchange
Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
Water, air and coax lines
0.125 in. (3 mm) O.D. water x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
Accessories
Accessories
Part Number
Description
750-420-G1
Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)
