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LEAK DETECTORS

GAS TECHNOLOGY

VACUUM TECHNOLOGY

THIN FILM TECHNOLOGY

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1114_Pirani_PSG5XX

Bộ đo áp suất chân không Vacuum Pressure Gauges INFICON Pirani Gauges PSG50x & PSG51x

Giá bán: Liên Hệ.

  • Mô tả sản phẩm

Vacuum Pressure Gauges INFICON Pirani Gauges PSG50x & PSG51x – ATM To Medium Vacuum Gauge

The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace.

The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor systems and for standard applications, such as fore vacuum lines.

Advantages

  • Easy push button ATM and HV adjustment
  • Space saving rugged design
  • Aluminum housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance

Typical applications

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range

Specifications

PSG500 tungsten

Measurement rangeV+1.9 … +10.0
Accuracy(N2)
1 x 10-3 … 100 mbar% of reading±15%
5 x 10-4 … 1 x 10-3 mbar% of reading±50%
100 … 1000 mbar% of reading±50%
Repeatability (air)
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint
Number of setpointsNumber of setpointsnone
Setting rangembar‒
Hysteresis% of reading‒
Relay contact‒
Relay contact: Switching timems‒
Materials exposed to vacuumglass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

PSG500-S tungsten, setpoints

Measurement rangeV+1.9 … +10.0
Accuracy(N2)
1 x 10-3 … 100 mbar% of reading±15%
5 x 10-4 … 1 x 10-3 mbar% of reading±50%
100 … 1000 mbar% of reading±50%
Repeatability (air)
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint
Number of setpointsNumber of setpoints2
Setting rangembar2 x 10-3 … 500
Hysteresis% of reading10% above lower threshold
Relay contact30
Relay contact: Switching timems<20
Materials exposed to vacuumglass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

PSG502-S nickel, setpoints

Measurement rangeV+1.9 … +10.0
Accuracy(N2)
1 x 10-3 … 100 mbar% of reading±15%
5 x 10-4 … 1 x 10-3 mbar% of reading±50%
100 … 1000 mbar% of reading±50%
Repeatability (air)
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint
Number of setpointsNumber of setpoints2
Setting rangembar2 x 10-3 … 500
Hysteresis% of reading10% above lower threshold
Relay contact30
Relay contact: Switching timems<20
Materials exposed to vacuumglass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

PSG510-S tungsten, setpoints, ceramic feedthroughs

Measurement rangeV+1.9 … +10.0
Accuracy(N2)
1 x 10-3 … 100 mbar% of reading±15%
5 x 10-4 … 1 x 10-3 mbar% of reading±50%
100 … 1000 mbar% of reading±50%
Repeatability (air)
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint
Number of setpointsNumber of setpoints2
Setting rangembar2 x 10-3 … 500
Hysteresis% of reading10% above lower threshold
Relay contact30
Relay contact: Switching timems<20
Materials exposed to vacuumAI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement rangeV+1.9 … +10.0
Accuracy(N2)
1 x 10-3 … 100 mbar% of reading±15%
5 x 10-4 … 1 x 10-3 mbar% of reading±50%
100 … 1000 mbar% of reading±50%
Repeatability (air)
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint
Number of setpointsNumber of setpoints2
Setting rangembar2 x 10-3 … 500
Hysteresis% of reading10% above lower threshold
Relay contact30
Relay contact: Switching timems<20
Materials exposed to vacuumAI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435

Part Number

Part Number

PSG500 tungsten
350-060PSG500 DN 16 ISO-KF.
350-061PSG500 1/8″ NPT
350-062PSG500 DN 16 CF-R
350-063PSG500 1/2″ Tube
350-064PSG500 8-VCR (1/2″)
350-065PSG500 4-VCR (1/4″)
350-066PSG500 7/16-20 UNF
350-067PSG500 DN 16 ISO-KF, ext. body
350-068PSG500 DN 16 CF-R, ext. body
PSG500-S tungsten, setpoints
350-080PSG500-S DN 16 ISO-KF
350-081PSG500-S 1/8″ NPT
350-082PSG500-S DN 16 CF-R
350-083PSG500-S 1/2″ Tube
350-084PSG500-S 8-VCR (1/2″)
350-085PSG500-S 4-VCR (1/4″)
350-086PSG500-S 7/16-20 UNF
350-087PSG500-S DN 16 ISO-KF, ext. body
350-088PSG500-S DN 16 CF-R, ext. body
PSG502-S nickel, setpoints
350-140PSG502-S DN 16 ISO-KF
350-141PSG502-S 1/8″ NPT
350-142PSG502-S DN 16 CF-R
350-143PSG502-S 1/2″ Tube
350-144PSG502-S 8-VCR (1/2″)
350-145PSG502-S 4-VCR (1/4″)
350-146PSG502-S 7/16-20 UNF
350-147PSG502-S DN 16 ISO-KF, ext. body
350-148PSG502-S DN 16 CF-R, ext. body
PSG510-S tungsten, setpoints, ceramic feedthroughs
350-200PSG510-S DN 16 ISO-KF
PSG512-S nickel, setpoints, ceramic feedthroughs
350-300PSG512-S DN 16 ISO-KF

Accessories

PSG500 tungsten
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
PSG500-S tungsten, setpoints
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
PSG502-S nickel, setpoints
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
PSG510-S tungsten, setpoints, ceramic feedthroughs
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
PSG512-S nickel, setpoints, ceramic feedthroughs
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m

Spare Parts

PSG500 tungsten
350-920PSG500 Spare Sensor DN 16 KF
350-921PSG500 Spare Sensor 1/8″ NPT
350-922PSG500 Spare Sensor DN 16 CF-R
350-923PSG500 Spare Sensor 1/2″ Tube
350-924PSG500 Spare Sensor 8-VCR (1/2″)
350-925PSG500 Spare Sensor 7/16-20 UNF
350-926PSG500 Spare Sensor 4-VCR (1/4″)
350-927PSG500 Spare Sensor DN 16 KF,ext.body
350-928PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG500-S tungsten, setpoints
350-920PSG500 Spare Sensor DN 16 KF
350-921PSG500 Spare Sensor 1/8″ NPT
350-922PSG500 Spare Sensor DN 16 CF-R
350-923PSG500 Spare Sensor 1/2″ Tube
350-924PSG500 Spare Sensor 8-VCR (1/2″)
350-925PSG500 Spare Sensor 7/16-20 UNF
350-926PSG500 Spare Sensor 4-VCR (1/4″)
350-927PSG500 Spare Sensor DN 16 KF,ext.body
350-928PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG502-S nickel, setpoints
350-900PSG502 Spare Sensor DN 16 KF
350-901PSG502 Spare Sensor 1/8″ NPT
350-902PSG502 Spare Sensor DN 16 CF-R
350-903PSG502 Spare Sensor 1/2″ Tube
350-904PSG502 Spare Sensor 8-VCR (1/2″)
350-905PSG502 Spare Sensor 7/16-20 UNF
350-906PSG502 Spare Sensor 4-VCR (1/4″)
350-907PSG502 Spare Sensor DN 16 KF,ext.body
350-908PSG502 Spare Sensor DN 16 CF-R,ext.body
PSG510-S tungsten, setpoints, ceramic feedthroughs
350-930PSG510 Spare Sensor DN 16 KF
PSG512-S nickel, setpoints, ceramic feedthroughs
350-940PSG512 Spare Sensor DN 16 KF

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