Bộ đo áp suất chân không Vacuum Pressure Gauges INFICON Pirani Gauges PCG55x
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Vacuum Pressure Gauges INFICON Pirani Gauges PCG55x – ATM TO MEDIUM VACUUM GAUGE
The INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product.
In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement. The PCG55x offers also a variety of features which allows the right product configuration for the demanded application.
Advantages
- Gas type independent above 10 mbar – allows safe venting with any gas mixture
- High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
- Versatile of mounting orientation – provides engineering freedom in tool design
- Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
- Latest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0
- Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
- Selectable output signal for easy integration
- Optional atmospheric switch, display and digital interfaces
- Compliance & standards: CE, EN, UL, CSA, RoHS
Typical applications
- Load Lock control
- Fore vacuum pressure measurement
- Safety circuits in vacuum systems
- General vacuum measurement and control in the medium and rough vacuum range
Specifications
PCG550 Tungsten
| Measurement range | mbar Torr | 5×10-5 … 1500 3.8×10-5 … 1125 |
| Accuracy (N2) | ||
| 5×10-4 … 1×10-3 mbar (N2) | % of reading | ±50 |
| 1×10-3 … 100 mbar (N2) | % of reading | ±15 |
| 100 … 950 mbar | % of reading | ±5 |
| 950 … 1050 mbar | % of reading | ±2.5 |
| Repeatability | ||
| 1×10-3 … 1100 mbar (N2) | % of reading | ±2 |
| Admissible temperature | ||
| Operation (ambient) | °C | +10 … +50 |
| Storage | °C | -20 … +65 |
| Bakeout at flange | °C | ≤80 |
| Bakeout at flange long tube | °C | ≤250 |
| Supply voltage | V (dc) | +15 … +30 |
| Setpoint relay | ||
| Number of setpoints | 2 | |
| Range (N2) | mbar | 5×10-5 … 1000 |
| Relay contact | Relay contact | n.o., potential free |
| Hysteresis | % of threshold | 10 |
| Contact rating solid state relays | V (dc) A (dc) | ≤30 ≤0.3 |
| Contact rating mechanical relays | V (dc) A (dc) | ≤30 ≤1 |
| Switching time | ms | ≤30 |
| Materials exposed to vacuum | W, Ni, NiFe, Al2O3, SnAg, stainless steel, glass | |
PCG552 Nickel
| Measurement range | mbar Torr | 5×10-5 … 1500 3.8×10-5 … 1125 |
| Accuracy (N2) | ||
| 5×10-4 … 1×10-3 mbar (N2) | % of reading | ±50 |
| 1×10-3 … 100 mbar (N2) | % of reading | ±15 |
| 100 … 950 mbar | % of reading | ±5 |
| 950 … 1050 mbar | % of reading | ±2.5 |
| Repeatability | ||
| 1×10-3 … 1100 mbar (N2) | % of reading | ±2 |
| Admissible temperature | ||
| Operation (ambient) | °C | +10 … +50 |
| Storage | °C | -20 … +65 |
| Bakeout at flange | °C | ≤80 |
| Bakeout at flange long tube | °C | ≤250 |
| Supply voltage | V (dc) | +15 … +30 |
| Setpoint relay | ||
| Number of setpoints | 2 | |
| Range (N2) | mbar | 5×10-5 … 1000 |
| Relay contact | Relay contact | n.o., potential free |
| Hysteresis | % of threshold | 10 |
| Contact rating solid state relays | V (dc) A (dc) | ≤30 ≤0.3 |
| Contact rating mechanical relays | V (dc) A (dc) | ≤30 ≤1 |
| Switching time | ms | ≤30 |
| Materials exposed to vacuum | Ni, NiFe, Al2O3, SnAg, stainless steel, glass | |
PCG554 ceramic coated
| Measurement range | mbar Torr | 5×10-5 … 1500 3.8×10-5 … 1125 |
| Accuracy (N2) | ||
| 5×10-4 … 1×10-3 mbar (N2) | % of reading | ±50 |
| 1×10-3 … 100 mbar (N2) | % of reading | ±15 |
| 100 … 950 mbar | % of reading | ±5 |
| 950 … 1050 mbar | % of reading | ±2.5 |
| Repeatability | ||
| 1×10-3 … 1100 mbar (N2) | % of reading | ±2 |
| Admissible temperature | ||
| Operation (ambient) | °C | +10 … +50 |
| Storage | °C | -20 … +65 |
| Bakeout at flange | °C | ≤80 |
| Bakeout at flange long tube | °C | ≤250 |
| Supply voltage | V (dc) | +15 … +30 |
| Setpoint relay | ||
| Number of setpoints | 2 | |
| Range (N2) | mbar | 5×10-5 … 1000 |
| Relay contact | Relay contact | n.o., potential free |
| Hysteresis | % of threshold | 10 |
| Contact rating solid state relays | V (dc) A (dc) | ≤30 ≤0.3 |
| Contact rating mechanical relays | V (dc) A (dc) | ≤30 ≤1 |
| Switching time | ms | ≤30 |
| Materials exposed to vacuum | Al2O3, stainless steel | |
Part Number
Accessories
| PCG550 Tungsten | |
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m
|
| PCG552 Nickel | |
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m
|
| PCG554 ceramic coated | |
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m
|
| PCG550 Tungsten | |
| Part Number | Description |
| 211-097 | Centering ring with fine filter DN 16 KF
|
| PCG552 Nickel | |
| Part Number | Description |
| 211-097 | Centering ring with fine filter DN 16 KF
|
| PCG554 ceramic coated | |
| Part Number | Description |
| 211-097 | Centering ring with fine filter DN 16 KF
|
| PCG550 Tungsten | |
| Part Number | Description |
| 303-333 | Diagnostic cable 1.9m (P3)
|
| PCG552 Nickel | |
| Part Number | Description |
| 303-333 | Diagnostic cable 1.9m (P3)
|
| PCG554 ceramic coated | |
| Part Number | Description |
| 303-333 | Diagnostic cable 1.9m (P3) |
Spare Parts
| PCG550 Tungsten | |
| Part Number | Description |
| 357-925 | PCG550 Spare Sensor, DN16ISO-KF |
| 357-926 | PCG550 Spare Sensor, DN16ISO-KF, long |
| 357-927 | PCG550 Spare Sensor, DN16CF-F |
| 357-928 | PCG550 Spare Sensor, DN16CF-R, long |
| 357-929 | PCG550 Spare Sensor, DN25ISO-KF |
| 357-930 | PCG550 Spare Sensor, 1/8″ NPT |
| 357-931 | PCG550 Spare Sensor, 8-VCR |
| 357-932 | PCG550 Spare Sensor, 4-VCR |
| 357-933 | PCG550 Spare Sensor, 7/16-20 UNF |
| 357-934 | PCG550 Spare Sensor, 29x29mm |
| 357-935 | PCG550 Spare Sensor, 4-VCR / 90°
|
| PCG552 Nickel | |
| Part Number | Description |
| 357-936 | PCG552 Spare Sensor, DN16ISO-KF |
| 357-937 | PCG552 Spare Sensor, DN16ISO-KF, long |
| 357-938 | PCG552 Spare Sensor, DN16CF-F |
| 357-939 | PCG552 Spare Sensor, DN16CF-R, long |
| 357-941 | PCG552 Spare Sensor, 1/8″ NPT |
| 357-942 | PCG552 Spare Sensor, 8-VCR |
| 357-943 | PCG552 Spare Sensor, 4-VCR |
| 357-944 | PCG552 Spare Sensor, 7/16-20 UNF |
| 357-945 | PCG552 Spare Sensor, 29x29mm |
| 357-946 | PCG552 Spare Sensor, 4-VCR / 90°
|
| PCG554 ceramic coated | |
| Part Number | Description |
| 357-947 | PCG554 Spare Sensor, DN16ISO-KF |
| 357-948 | PCG554 Spare Sensor, DN16ISO-KF, long |
| 357-949 | PCG554 Spare Sensor, DN16CF-F |
| 357-950 | PCG554 Spare Sensor, DN16CF-R, long |
| 357-951 | PCG554 Spare Sensor, DN25ISO-KF |
| 357-952 | PCG554 Spare Sensor, 1/8″ NPT |
| 357-953 | PCG554 Spare Sensor, 8-VCR |
| 357-954 | PCG554 Spare Sensor, 4-VCR |
| 357-955 | PCG554 Spare Sensor, 7/16-20 UNF |
| 357-956 | PCG554 Spare Sensor, 29x29mm |
| 357-957 | PCG554 Spare Sensor, 4-VCR / 90° |
Part Number
