Bộ đo áp suất chân không Vacuum Pressure Gauges INFICON Cold Cathode Gauges MPG40X
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Vacuum Pressure Gauges INFICON Cold Cathode Gauges MPG40X
“ATM to Ultra High Vacuum Gauge”
The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere).
Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.
Advantages
- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
- FPM or metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- High vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Specifications
MPG400 FPM sealed
| Measurement range (air, N2) | mbar Torr | 5 x 10-9 … 1000 3.8 x 10-9 … 760 |
| Accuracy | ||
| 1 x 10-8 … 100 mbar | % of reading | ≈±30% |
| Repeatability | ||
| 1 x 10-8 … 100 mbar | % of reading | ≈±5% |
| Temperature | ||
| Operation (ambient) | °C | +5 … +55 |
| Storage | °C | –40 … +65 |
| Bake-out (1) | °C | 150 |
| Supply voltage | ||
| At gauge | V (dc) | +15 … +30 |
| At supply unit with max. cable length (2) | V (dc) | +16 … +30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤2 |
| Materials exposed to vacuum | stainless steel, Al2O3, FPM75, Mo, Ni, Au, W | |
| (1) Without electronics and magnetic shielding. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable. | ||
MPG401 metal-sealed
| Measurement range (air, N2) | mbar Torr | 5 x 10-9 … 1000 3.8 x 10-9 … 760 |
| Accuracy | ||
| 1 x 10-8 … 100 mbar | % of reading | ≈±30% |
| Repeatability | ||
| 1 x 10-8 … 100 mbar | % of reading | ≈±5% |
| Temperature | ||
| Operation (ambient) | °C | +5 … +55 |
| Storage | °C | –40 … +65 |
| Bake-out (1) | °C | 150 |
| Supply voltage | ||
| At gauge | V (dc) | +15 … +30 |
| At supply unit with max. cable length (2) | V (dc) | +16 … +30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤2 |
| Materials exposed to vacuum | stainless steel, Al2O3, Ag, Cu, Sn, Mo, Ni, Au, W | |
| (1) Without electronics and magnetic shielding. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable. | ||
Part Number
Part Number
| MPG400 FPM sealed | |
| Part Number | Description |
| 351-010 | MPG400 FPM sealed, DN 25 ISO-KF |
| 351-011 | MPG400 FPM sealed, DN 40 ISO-KF |
| 351-012 | MPG400 FPM sealed, DN 40 CF-F |
| MPG401 metal-sealed | |
| Part Number | Description |
| 351-020 | MPG401 metal sealed, DN 25 ISO-KF |
| 351-021 | MPG401 metal sealed, DN 40 ISO-KF |
| 351-022 | MPG401 metal sealed, DN 40 CF-F |
| 351-023 | Magnetic shield |
Accessories
| MPG400 FPM sealed | |
| Part Number | Description |
| 351-023 | Magnetic shield |
| MPG401 metal-sealed | |
| Part Number | Description |
| 351-023 | Magnetic shield |
Spare Parts
| MPG400 FPM sealed | |
| Part Number | Description |
| BN846469-T | Spare measurement system MPG400 DN25 KF |
| MPG401 metal-sealed | |
| Part Number | Description |
| BN846472-T | Replacement meas. unit MPG401 DN25 KF |
| MPG400 FPM sealed | |
| Part Number | Description |
| BN846470-T | Spare measurement system MPG400 DN40 KF |
| MPG401 metal-sealed | |
| Part Number | Description |
| BN846473-T | Replacement meas. unit MPG401 DN40 KF |
| MPG400 FPM sealed | |
| Part Number | Description |
| BN846471-T | Spare measurement system MPG400 DN40CF-F |
| MPG401 metal-sealed | |
| Part Number | Description |
| BN846474-T | Spare meas. system, MPG401 DN40CF-F |
| MPG400 FPM sealed | |
| Part Number | Description |
| 351-994 | MPG40x Ignition tool set |
| MPG401 metal-sealed | |
| Part Number | Description |
| 351-994 | MPG40x Ignition tool set |
| MPG400 FPM sealed | |
| Part Number | Description |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| MPG401 metal-sealed | |
| Part Number | Description |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| MPG400 FPM sealed | |
| Part Number | Description |
| 351-998 | MPG400 Repair set. |
| MPG401 metal-sealed | |
| Part Number | Description |
| 351-996 | MPG401 Repair set |
| MPG400 FPM sealed | |
| Part Number | Description |
| 351-999 | MPG400 Maintenance set |
| MPG401 metal-sealed | |
| Part Number | Description |
| 351-997 | MPG401 Maintenance set |
