Vacuum Pressure Gauges INFICON Cold Cathode Gauges Gemini® MxG5xx

ATM to Ultra-High Vacuum Gauge

The INFICON Gemini^® Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications. While Gemini MPG50x combines two sensor systems in one small device to measure from atmosphere down to 1×10^{– 9} mbar, the Gemini MAG50x is a pure cold cathode sensor System (without Pirani element) which covers the range from 1×10^-2 mbar to 1×10^{– 9} mbar. The patented ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind.

Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration. The Cold cathode and Pirani combination version (MPG) option provides seamless transition, reliability, practicality and flexibility across wide ranging applications.

MAG and MPG Gemini are now available with PROFINET, EtherCAT fieldbus and setpoints as MAG55x and MPG55x.

For corrosive applications we suggest to use the ceramic coated version MxG5x4. Feedthrough and Pirani inside the sensor head are fully ceramic coated for enhanced corrosion resistance.

Geminiv^® Cold Cathode and combination sensor`s come with fully integrated digital electronics, providing ultimate flexibility for System Integration.

Both, cold cathode and Pirani combination sensor Option provide seamless Transition, reliability, proactivity and flexibility across wide ranging applications.

Advantages

• Long lifetime in harsh environments
• Low magnetic stray field
• Reliable fast ignition
• Fastest maintenance – replaceable insert
• Compact size – easy to integrate
• Corrosion proof feed-through & sensor element
• Selectable measuring current
• 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
• PROFINET, EtherCAT and RS232/ RS485 digital interace

Typical applications

• Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
• General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
• Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.

Specifications

MAG5xx

Measurement range (air, N2)	mbar Torr	1×10-9 … 1×10-2 (7.6×10-10 … 7.6×10-3)
Accuracy
1×10-8 … 1×10-2 mbar	% of reading	30
1×10-2 … 100 mbar	% of reading	–
100 … 1000 mbar	% of reading	–
Repeatability
1×10-8 … 1×10-2 mbar	% of reading	5
1×10-8 … 100 mbar	% of reading	–
Temperature
Operation (ambient)	°C	+5 … +55
Bakeout at flange (1)	°C	+150
Storage	°C	-40 … +70
Filament temperature	°C	–
Supply voltage
At gauge (2)	V (dc)	+14.5 … +30
Ripple	V (p-p)	<1
Power consumption	W	<3
Fuse to be connected	AT	<1
(1) Without electronics. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.

MPG5xx

Measurement range (air, N2)	mbar Torr	1×10-9 … 1000 7.6×10-10 … 760
Accuracy
1×10-8 … 1×10-2 mbar	% of reading	30
1×10-2 … 100 mbar	% of reading	30
100 … 1000 mbar	% of reading	50
Repeatability
1×10-8 … 1×10-2 mbar	% of reading	5
1×10-8 … 100 mbar	% of reading	5
Temperature
Operation (ambient)	°C	+5 … +55
Bakeout at flange (1)	°C	+150
Storage	°C	-40 … +70
Filament temperature	°C	120
Supply voltage
At gauge (2)	V (dc)	+14.5 … +30
Ripple	V (p-p)	<1
Power consumption	W	<3
Fuse to be connected	AT	<1
(1) Without electronics. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.

Part Number

Accessories

MAG5xx
Part Number	Description
211-098	Centering ring with fine filter DN 25 KF
351-550	MxG50x Ignition tool set
211-113	Centering ring with baffle DN 25 KF
353-512	Baffle for DN 25 KF flange
MPG5xx
Part Number	Description
211-098	Centering ring with fine filter DN 25 KF
351-550	MxG50x Ignition tool set
211-113	Centering ring with baffle DN 25 KF
353-512	Baffle for DN 25 KF flange

Spare Parts

MAG5xx
Part Number	Description
351-500	MAG500 spare sensor, 25KF, SS
351-512	MAG500 spare sensor, 40KF, SS
351-536	MAG500 spare sensor, 40CF-R, SS
351-524	MAG500 spare sensor, 40CF-F, SS
351-502	MAG500 spare sensor, 25KF, Ti
351-514	MAG500 spare sensor, 40KF, Ti
351-538	MAG500 spare sensor, 40CF-R, Ti
351-526	MAG500 spare sensor, 40CF-F, Ti
351-501	MAG504 spare sensor, 25KF, SS
351-513	MAG504 spare sensor, 40KF, SS
351-537	MAG504 spare sensor, 40CF-R, SS
351-525	MAG504 spare sensor, 40CF-F, SS
351-503	MAG504 Ersatzsensor, 25KF, Ti
351-515	MAG504 spare sensor, 40KF, TI
351-539	MAG504 spare sensor, 40CF-R, Ti
351-527	MAG504 spare sensor, 40CF-F, Ti
351-995	MxG50x spare parts ignition aid (10 pieces)
351-555	Spare ion chamber SS
351-556	Spare ion chamber Ti
MPG5xx
Part Number	Description
351-506	MPG500 spare sensor, 25KF, SS
351-518	MPG500 spare sensor, 40KF, SS
351-542	MPG500 spare sensor, 40CF-R, SS
351-530	MPG500 spare sensor, 40CF-F, SS
351-508	MPG500 spare sensor, 25KF, Ti
351-520	MPG500 spare sensor, 40KF, Ti
351-544	MPG500 spare sensor, 40CF-R, Ti
351-532	MPG500 spare sensor, 40CF-F, Ti
351-507	MPG504 SS,LC,9DSub,25KF
351-519	MPG504 spare sensor, 40KF, SS
351-543	MPG504 spare sensor, 40CF-R, SS
351-531	MPG504 spare sensor, 40CF-F, SS
351-509	MPG504 spare sensor, 25KF, Ti
351-521	MPG504 spare sensor, 40KF, Ti
351-545	MPG504 spare sensor, 40CF-R, Ti
351-533	MPG504 spare sensor, 40CF-F, Ti
351-995	MxG50x spare parts ignition aid (10 pieces)
351-555	Spare ion chamber SS
351-556	Spare ion chamber TI

Part Number