Bộ điều khiển lắng đọng Deposition Controller INFICON XTC/3
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Deposition Controller INFICON XTC/3 – Advanced, Affordable Rate Control for Single or Multiple Layers
Now get everything you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity.
INFICON, the global leader in thin film deposition control, now offers an instrument with a remarkably low cost of ownership for unprecedented value.
Whether your control needs reflect production or research and development use, you will find a precise match in the INFICON XTC/3.
Worldwide INFICON Support
No matter where you are, you get fast answers, attentive service, and maximum uptime. With offices around the world, INFICON is the only manufacturer of thin film deposition controllers to offer you local service and technical support around the world.
Features
- Available in single-layer and multiple-layer models
- Patented ModeLock technology prevents film thickness errors caused by mode-hopping
- Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
- XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
- XTC/3S single-layer model supports up to 9 films, 2 sensors, and two sources
- Easy-to-read TFT LCD graphics displays
- Films and processes can be assigned unique, descriptive names for easy retrieval
- Ethernet connection available
- Free-standing (no computer necessary) or optional Windows® software for PC operation
- Plug-and-play replacement for INFICON XTC/2 controllers (limited to XTC/2 features and command set)
Typical Applications
- High End Optical Coatings
Specifications
XTC3/S
Measurement Frequency Range | 6.0 to 5.0 MHz (fixed) |
Thickness & Rate Resolution / Measurement (1) | ±0.034 Å |
Number of Sensor Inputs | 2 |
Number of Source Outputs | 2 |
(1) Tooling/density = 100/1, fundamental frequency = 6 MHz |
XTC3/M
Measurement Frequency Range | 6.0 to 5.0 MHz (fixed) |
Thickness & Rate Resolution / Measurement (1) | ±0.034 Å |
Number of Sensor Inputs | 2 |
Number of Source Outputs | 2 |
(1) Tooling/density = 100/1, fundamental frequency = 6 MHz |
Part Number
Accessories
Name | Description |
Front Load Single Sensor | Front Load Single Sensor |
Front Load Dual Sensor | Front Load Dual Sensor |
Cool Drawer Single Sensor | Cool Drawer Single Sensor |
Cool Drawer Dual Sensor | Cool Drawer Dual Sensor |
Easy Rate Single Sensor | Easy Rate Single Sensor |
Easy Rate Dual Sensor | Easy Rate Dual Sensor |
ALD Sensor | UHV Bakeable Sensor |
UHV Bakeable Sensor | Sputtering Sensor |
Sputtering Sensor | CrystalSix® Sensor |
CrystalSix® Sensor | Crystal 12® Sensor |
Crystal 12® Sensor | RSH-600 Rotary Sensor |
Accessories and Replacement Parts
Part Number | Description |
755-262-G1 | Handheld Power Controller (for manual power control) |
780-702-G1 | One unit rack mount kit – Provides all required materials to mount one XTC/3 unit in a standard 19 in. rack |
780-702-G2 | Two unit rack mount kit – Provides all required materials to mount two XTC/3 units side by side in a standard 19 in. rack |
780-032-G1 | Editor Software, XTC/3 |
779-220-G1 | CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables |
779-220-G2 | CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables |
Oscillator kits | (Includes oscillator and cables) |
780-611-G15 | XIU PKG with 15 ft. (4.6 m) cable – Fore use with XTC/3 |
780-611-G30 | XIU PKG with 30 ft. (9.1 m) cable – For use with XTC/3 |
780-611-G50 | XIU PKG with 50 ft. (15.2 m) cable – For use with XTC/3 |
780-611-G100 | XIU PKG with 100 ft. (30.5 m) cable – For use with XTC/3 |
780-612-G15 | 4m XIU PKG with 15 ft. (4.6 m) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with XTC/3 |
780-612-G30 | 4m XIU PKG with 30 ft. (9.1 m) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with XTC/3 |
780-612-G50 | 4m XIU PKG with 50 ft. (15.2 m) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with XTC/3 |
780-612-G100 | 4m XIU PKG with 100 ft. (30.5 m) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with XTC/3 |
780-613-G15 | 4m XIU PKG with 15 ft. (4.6 m) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with XTC/3 |
780-613-G30 | 4m XIU PKG with 30 ft. (9.1 m) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with XTC/3 |
780-613-G50 | 4m XIU PKG with 50 ft. (15.2 m) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with XTC/3 |
780-613-G100 | 4m XIU PKG with 100 ft. (30.5 m) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with XTC/3 |
Oscillator Only | (No cables included) |
780-600-G1 | XTC/3 XIU (oscillator) – For XIU to sensor head cable lengths of 6 in. to 72 in. (15 cm to 183 cm) |
780-600-G2 | XTC/3 XIU (oscillator) – For XIU to sensor head cable lengths of 118 in. to 157 in. (3 m to 4 m) |
Cables | |
755-257-G6 | 15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough |
600-1261-P15 | 4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU |
600-1261-P30 | 9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
600-1261-P50 | 15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
600-1261-P100 | 30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
Consumables
Name | Description |
Quartz Monitor Crystals | Quartz Monitor Crystals |