Bộ điều khiển lắng đọng Deposition Controller INFICON SQC-310
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Deposition Controller INFICON SQC-310 – Highly Accurate Sequential or Codeposition Control
With advanced electronics, an improved display, and a very affordable price, the INFICON SQC-310 Series gives you features not found on competitors’ thin film controllers. And you can choose the ideal model for your application: sequential deposition (SQC-310) or codeposition (SQC-310C).
Features
- Bright, color LCD display – available in English or Chinese
- Standard RS-232 and USB (RS-232 and Ethernet optional)
- Easy setup and operation with a “Quick Setup” Menu, 6 context-sensitive push buttons, and convenient parameter setting knob
- Windows® program for developing, testing, and downloading processes, and for logging instrument data to your PC for process analysis and quality control
- Accurate process control, especially for low deposition rates, with ±0.03 Hz resolution at 10 readings/second
- Storage capacity for up to 100 processes, 1,000 layers, 50 films
- Monitoring of source material with a single sensor or with multiple sensors to provide accurate source distribution monitoring
Specifications
SQC-310
| Measurement | ||
| QCM Inputs | QCM Inputs | 2 (4 optional) |
| Measurement Frequency Range | Measurement Frequency Range | Adjustable: |
| 1.0 MHz minimum | ||
| 6.5 MHz maximum | ||
| Frequency Resolution (1) | Frequency Resolution (1) | ± 0.012 Hz |
| Thickness and rate resolution/measurement (2) | Thickness and rate resolution/measurement (2) | ±0.015 Å |
| Frequency Stability | Frequency Stability | ± 2 ppm total, 0 to 50C |
| Measurement Interval | Measurement Interval | 0.10 to 1.0 s (adjustable) |
| Rate Display | Rate Display | 0.01 Å/sec |
| Control | ||
| Storage | Storage | 100 processes, 1000 layers, 50 films |
| Control Outputs | Control Outputs | 2 (4 optional) |
| Output Signal | Output Signal | ± 0 to 10 VDC, 15 bits |
| Digital Inputs/Relays | Digital Inputs/Relays | 8/8 (16/16 optional) |
| Digital Inputs | Digital Inputs | 5 VDC non-isolated |
| Relays | Relays | SPST Form 1A, 30V, 2A max |
| Interface(s) | Interface(s) | Standard RS-232 and USB (RS-232 and Ethernet optional) |
| Remote Power Control | Remote Power Control | Optional (IPN 782-900-017) |
| Display | ||
| Type | Type | 1/4 VGA 320 x 240 active matrix color LCD |
| Graphs | Graphs | Rate, deviation, power or full screen numeric |
| General | ||
| Power | Power | 100-240 VAC, 50/60 Hz, 25W |
| Compliance | Compliance | CE, RoHS |
| Windows® Software | Windows® Software | Included |
| Housing / Mounting | Housing / Mounting | 5 1/4” half-rack |
| (1) Resolution given for 0.25 s measurement interval | ||
| (2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval | ||
SQC-310C
| Measurement | ||
| QCM Inputs | QCM Inputs | 4 |
| Measurement Frequency Range | Measurement Frequency Range | Adjustable: |
| 1.0 MHz minimum | ||
| 6.5 MHz maximum | ||
| Frequency Resolution (1) | Frequency Resolution (1) | ± 0.012 Hz |
| Thickness and rate resolution/measurement (2) | Thickness and rate resolution/measurement (2) | ±0.015 Å |
| Frequency Stability | Frequency Stability | ± 2 ppm total, 0 to 50C |
| Measurement Interval | Measurement Interval | 0.10 to 1.0 s (adjustable) |
| Rate Display | Rate Display | 0.01 Å/sec |
| Control | ||
| Storage | Storage | 100 processes, 1000 layers, 50 films |
| Control Outputs | Control Outputs | 4 |
| Output Signal | Output Signal | ± 0 to 10 VDC, 15 bits |
| Digital Inputs/Relays | Digital Inputs/Relays | 16/16 |
| Digital Inputs | Digital Inputs | 5 VDC non-isolated |
| Relays | Relays | SPST Form 1A, 30V, 2A max |
| Interface(s) | Interface(s) | Standard RS-232 and USB (RS-232 and Ethernet optional) |
| Remote Power Control | Remote Power Control | Optional (IPN 782-900-017) |
| Display | ||
| Type | Type | 1/4 VGA 320 x 240 active matrix color LCD |
| Graphs | Graphs | Rate, deviation, power or full screen numeric |
| General | ||
| Power | Power | 100-240 VAC, 50/60 Hz, 25 W |
| Compliance | Compliance | CE, RoHS |
| Windows® Software | Windows® Software | Included |
| Housing / Mounting | Housing / Mounting | 5 1/4” half-rack |
| (1) Resolution given for 0.25 s measurement interval | ||
| (2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval | ||
Accessories
Accessories
| Name | Description |
| Front Load Single Sensor | Front Load Single Sensor |
| Front Load Dual Sensor | Front Load Dual Sensor |
| Cool Drawer Single Sensor | Cool Drawer Single Sensor |
| Cool Drawer Dual Sensor | Cool Drawer Dual Sensor |
| Easy Rate Single Sensor | Easy Rate Single Sensor |
| Easy Rate Dual Sensor | Easy Rate Dual Sensor |
| UHV Bakeable Sensor | UHV Bakeable Sensor |
| Sputtering Sensor | Sputtering Sensor |
| CrystalSix® Sensor | CrystalSix® Sensor |
| Crystal 12® Sensor | Crystal 12® Sensor |
| RSH-600 Rotary Sensor | RSH-600 Rotary Sensor |
Accessories and Replacement Parts
| Part Number | Description |
| 782-900-007 | Full Rack Extender – Mounts one SQC-310 or Composer Elite in a 19 in. rack (includes blank-off) |
| 782-900-016 | Rack adapter – mounts two SQC-310 instruments in 19 in. rack |
| 782-502-097-G1 | Ethernet option card |
| 782-502-096-G2 | USB option card |
| Oscillator kits | (Includes oscillator and cables) |
| 783-500-109-10 | 3 m (10 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable |
| 783-500-109-25 | 7.6 m (25 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable |
| 783-500-109-50 | 15.2 m (50 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable |
| 783-500-109-75 | 22.8 m (75 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable |
| Oscillator Only | (No cables included) |
| 783-500-013-G1 | OSC-100 oscillator only (no cables) |
| Cables | |
| 782-902-011 | 15.2 cm (6 in.) BNC cable, male/female |
| 782-902-012-10 | 3 m (10 ft.) BNC cable, male/male |
| 782-902-012-25 | 7.6 m (25 ft.) BNC cable, male/male |
| 782-902-012-50 | 15.2 m (50 ft.) BNC cable, male/male |
| 782-902-012-75 | 22.8 m (75 ft.) BNC cable, male/male |
