Bộ điều khiển lắng đọng Deposition Controller INFICON IC6
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Deposition Controller INFICON IC6 – Making Excellence Repeatable
The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process.
The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.
Features
- INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
- Codeposition of up to six sources simultaneously
- Color TFT LCD display makes it easy to see what’s going on with your process
- +/-0.0035 Hz over 100ms sample
- USB data storage for screen shots, recipe storage and data logging
- Powerful I/O with flexibility to integrate into simple or complex systems (using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs), and use of logic functions (100 logic statements)
- 6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
- Can accommodate up to 50 processes of 200 layers each and processes can be linked together for a maximum of 10,000 layers
- Multiple sensor averaging for up to 8 sensors
- 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
- Optional Ethernet communications
- Optional IC6 Configuration Editor Software (part number 781-620-G1) – LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format.
- RoHS compliant
Typical Applications
- High End Optical Coating
Specifications
| Measurement Performance | |
| Thickness and rate resolution/measurement (1) | ±0.00433 Å |
| Measurement frequency range | 6.0 to 4.5 MHz (fixed)
|
| Process Recipe & Data Management | |
| Material programs | 32 |
| Process layers (per process) | 200 |
| Processes | 50 (processes can be linked together)
|
| Number of sources (2) | up to 6
|
| (1) Tooling/density = 100/1, fundamental frequency = 6 MHz (2) The IC6 has 6 DAC outputs standard, 6 more can be added as an option. Any of the 12 can be configured as source control voltages or recorder outputs however the number of sources that can be controlled simultaneously is 6 | |
Part Number
Accessories
| Name | Description |
| Front Load Single Sensor | Front Load Single Sensor |
| Front Load Dual Sensor | Front Load Dual Sensor |
| Cool Drawer Single Sensor | Cool Drawer Single Sensor |
| Cool Drawer Dual Sensor | Cool Drawer Dual Sensor |
| Easy Rate Single Sensor | Easy Rate Single Sensor |
| Easy Rate Dual Sensor | Easy Rate Dual Sensor |
| UHV Bakeable Sensor | UHV Bakeable Sensor |
| ALD Sensor | ALD Sensor |
| Sputtering Sensor | Sputtering Sensor |
| CrystalSix® Sensor | CrystalSix® Sensor |
| Crystal 12® Sensor | Crystal 12® Sensor
|
| Accessories and Replacement Parts | |
| Part Number | Description |
| 779-220-G1 | CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables |
| 779-220-G2 | CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables |
| Oscillator kits | (Includes oscillator and cables) |
| 781-611-G15 | XIU PKG with 4.6 m (15 ft.) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-611-G30 | XIU PKG with 9.1 m (30 ft.) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-611-G50 | XIU PKG with 15.2 m (50 ft.) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-611-G100 | XIU PKG with 30.5 m (100 ft.) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-612-G15 | 4m XIU PKG with 4.6 m (15 ft.) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-612-G30 | 4m XIU PKG with 9.1 m (30 ft.) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-612-G50 | 4 m XIU PKG with 15.2 m (50 ft.) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-612-G100 | 4m XIU with 30.5 m (100 ft.) XIU cable – Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-613-G15 | 4m XIU PKG with 4.6 m (15 ft.) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-613-G30 | 4m XIU PKG with 9.1 m (30 ft.) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthough) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-613-G50 | 4m XIU PKG with 15.2 m (50 ft.) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with Cygnus 2, IC6, or XTC/3 |
| 781-613-G100 | 4m XIU PKG with 30.5 m (100 ft.) XIU cable – Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable – For use with Cygnus 2, IC6, or XTC/3 |
| Oscillator Only | (No cables included) |
| 781-600-G1 | XIU (oscillator) – For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) – For use with Cygnus 2, IC6, or XTC/3 |
| 781-600-G2 | XIU (oscillator) – for XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) – For use with Cygnus 2 or IC6 |
| Cables | |
| 600-1261-P100 | 30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
| 600-1261-P15 | 4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU |
| 600-1261-P30 | 9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
| 600-1261-P50 | 15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
| 755-257-G6 | 15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough |
| Configuration Editor Software | |
| 781-620-G1 | IC6 Configuration Editor Software – LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format. |
Consumables
| Name | Description |
|---|---|
| Quartz Monitor Crystals | Quartz Monitor Crystals |
